{"title":"用于空气采样的Mems微型泵","authors":"O. Olszewski, J. Kubík, R. Houlihan","doi":"10.1109/TRANSDUCERS.2019.8808627","DOIUrl":null,"url":null,"abstract":"This paper presents a MEMS air micro-pump. The innovative aspect of this work includes the demonstration of a single device that can pump air under two different operation modes. In the first mode the device operates based on the principle of an acoustic standing wave. In the second, its operation is based on the mechanical displacement mode. The measured air flow-rate depends on the operation mode and the driving voltage and extends to 2 and 8 mL/min for the acoustic standing wave and displacement mode, respectively.","PeriodicalId":6672,"journal":{"name":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","volume":"44 1","pages":"2017-2020"},"PeriodicalIF":0.0000,"publicationDate":"2019-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Mems Micro-Pump for Air Sampling Application\",\"authors\":\"O. Olszewski, J. Kubík, R. Houlihan\",\"doi\":\"10.1109/TRANSDUCERS.2019.8808627\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This paper presents a MEMS air micro-pump. The innovative aspect of this work includes the demonstration of a single device that can pump air under two different operation modes. In the first mode the device operates based on the principle of an acoustic standing wave. In the second, its operation is based on the mechanical displacement mode. The measured air flow-rate depends on the operation mode and the driving voltage and extends to 2 and 8 mL/min for the acoustic standing wave and displacement mode, respectively.\",\"PeriodicalId\":6672,\"journal\":{\"name\":\"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)\",\"volume\":\"44 1\",\"pages\":\"2017-2020\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-06-23\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/TRANSDUCERS.2019.8808627\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/TRANSDUCERS.2019.8808627","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
This paper presents a MEMS air micro-pump. The innovative aspect of this work includes the demonstration of a single device that can pump air under two different operation modes. In the first mode the device operates based on the principle of an acoustic standing wave. In the second, its operation is based on the mechanical displacement mode. The measured air flow-rate depends on the operation mode and the driving voltage and extends to 2 and 8 mL/min for the acoustic standing wave and displacement mode, respectively.
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