{"title":"一种新型环保的化学镀铜浴","authors":"S. Rekha, K. Srinvasan","doi":"10.1109/GTEC.2011.6167666","DOIUrl":null,"url":null,"abstract":"Methane sulphonic acid is most promising eco friendly acid replacing highly polluting acids like HF. In this study a novel eco friendly electroless copper methane sulphonate bath has been developed. The source material is copper methane sulphonate, which has high solubility, EDTA as chelating agent, glyoxylic acid as chelating agent and NaOH is used as a pH adjuster. The bath is optimized for the parameters affecting the rate of deposition. SEM studies shows refined grain size and thus a promising eco-friendly bath is developed.","PeriodicalId":13706,"journal":{"name":"International Conference on Green technology and environmental Conservation (GTEC-2011)","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2011-12-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"A novel eco-friendly bath for electroless copper deposition\",\"authors\":\"S. Rekha, K. Srinvasan\",\"doi\":\"10.1109/GTEC.2011.6167666\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Methane sulphonic acid is most promising eco friendly acid replacing highly polluting acids like HF. In this study a novel eco friendly electroless copper methane sulphonate bath has been developed. The source material is copper methane sulphonate, which has high solubility, EDTA as chelating agent, glyoxylic acid as chelating agent and NaOH is used as a pH adjuster. The bath is optimized for the parameters affecting the rate of deposition. SEM studies shows refined grain size and thus a promising eco-friendly bath is developed.\",\"PeriodicalId\":13706,\"journal\":{\"name\":\"International Conference on Green technology and environmental Conservation (GTEC-2011)\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2011-12-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Conference on Green technology and environmental Conservation (GTEC-2011)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/GTEC.2011.6167666\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Green technology and environmental Conservation (GTEC-2011)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/GTEC.2011.6167666","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
A novel eco-friendly bath for electroless copper deposition
Methane sulphonic acid is most promising eco friendly acid replacing highly polluting acids like HF. In this study a novel eco friendly electroless copper methane sulphonate bath has been developed. The source material is copper methane sulphonate, which has high solubility, EDTA as chelating agent, glyoxylic acid as chelating agent and NaOH is used as a pH adjuster. The bath is optimized for the parameters affecting the rate of deposition. SEM studies shows refined grain size and thus a promising eco-friendly bath is developed.
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