薄膜孔隙度表征方法综述

2017 China Semiconductor Technology International Conference (CSTIC) Pub Date : 2017-03-01 DOI:10.1109/CSTIC.2017.7919811

K. Mogilnikov, Dongchen Che, M. Baklanov, Kangning Xu, Kaidong Xu

{"title":"薄膜孔隙度表征方法综述","authors":"K. Mogilnikov, Dongchen Che, M. Baklanov, Kangning Xu, Kaidong Xu","doi":"10.1109/CSTIC.2017.7919811","DOIUrl":null,"url":null,"abstract":"The most important properties of porous thin films depend on the pore structure. The evaluation of porosity is of great importance for analyzing their pore structure. Some known methods were adapted and proposed for the study of thin films porosity, such as microscope techniques, radiation scattering, wave propagation, gas adsorption. Besides, there are some new approaches developed for thin film porosity, such as X-ray porosimetry, positron annihilation lifetime spectroscopy, quartz crystal microbalance, and ellipsometric porosimetry. In this paper, the possibilities of various methods of studying thin films porosity will be discussed, including the latest developments in this area.","PeriodicalId":6846,"journal":{"name":"2017 China Semiconductor Technology International Conference (CSTIC)","volume":"73 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2017-03-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Review of thin film porosity characterization approaches\",\"authors\":\"K. Mogilnikov, Dongchen Che, M. Baklanov, Kangning Xu, Kaidong Xu\",\"doi\":\"10.1109/CSTIC.2017.7919811\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"The most important properties of porous thin films depend on the pore structure. The evaluation of porosity is of great importance for analyzing their pore structure. Some known methods were adapted and proposed for the study of thin films porosity, such as microscope techniques, radiation scattering, wave propagation, gas adsorption. Besides, there are some new approaches developed for thin film porosity, such as X-ray porosimetry, positron annihilation lifetime spectroscopy, quartz crystal microbalance, and ellipsometric porosimetry. In this paper, the possibilities of various methods of studying thin films porosity will be discussed, including the latest developments in this area.\",\"PeriodicalId\":6846,\"journal\":{\"name\":\"2017 China Semiconductor Technology International Conference (CSTIC)\",\"volume\":\"73 1\",\"pages\":\"1-4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2017-03-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2017 China Semiconductor Technology International Conference (CSTIC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CSTIC.2017.7919811\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2017 China Semiconductor Technology International Conference (CSTIC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CSTIC.2017.7919811","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}

引用次数: 1

摘要

多孔薄膜最重要的性质取决于其孔结构。孔隙度的评价对分析其孔隙结构具有重要意义。采用并提出了一些已知的方法来研究薄膜孔隙度，如显微镜技术、辐射散射、波传播、气体吸附等。此外，研究薄膜孔隙度的新方法有x射线孔隙度法、正电子湮没寿命谱法、石英晶体微天平法、椭偏孔隙度法等。本文将讨论研究薄膜孔隙度的各种方法的可能性，包括该领域的最新进展。

本文章由计算机程序翻译，如有差异，请以英文原文为准。

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Review of thin film porosity characterization approaches

The most important properties of porous thin films depend on the pore structure. The evaluation of porosity is of great importance for analyzing their pore structure. Some known methods were adapted and proposed for the study of thin films porosity, such as microscope techniques, radiation scattering, wave propagation, gas adsorption. Besides, there are some new approaches developed for thin film porosity, such as X-ray porosimetry, positron annihilation lifetime spectroscopy, quartz crystal microbalance, and ellipsometric porosimetry. In this paper, the possibilities of various methods of studying thin films porosity will be discussed, including the latest developments in this area.

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2017 China Semiconductor Technology International Conference (CSTIC)

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