锆石陶瓷上的再结晶硅薄膜太阳能电池

K. Schillinger, S. Janz, S. Reber
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引用次数: 3

摘要

本文介绍了再结晶硅薄膜太阳电池的制备工艺及其典型缺陷。技术等级的锆英(ZrSiO4)陶瓷衬底,潜在生产成本<;使用了20欧元/平方米。这些衬底被包裹在晶体碳化硅中,通过常压化学气相沉积(APCVD)沉积。用APCVD法制备了活性硅层。采用区域熔炼再结晶(ZMR)扩大Si晶粒。在SiC上结晶的Si薄膜表现出平行于生长方向的Σ3双晶界特征。硅晶体的宽度可达几毫米,长度可达几厘米。由这种材料制成的太阳能电池在锆石上的开路电压高达566 mV,在同样处理的mc-Si上的开路电压高达600 mV。
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Recrystallized silicon thin-film solar cells on zircon ceramics
This work describes the processing of recrystallized silicon thin-film solar cells and its typical defects. Zircon (ZrSiO4) ceramic substrates of technical grade with potential production costs of <; 20 €/m2 were used. Those substrates were encapsulated in crystalline silicon carbide, deposited by atmospheric pressure chemical vapor deposition (APCVD). The active silicon layers were also formed using APCVD. Zone-melting recrystallization (ZMR) was used to enlarge Si grains. Si films crystallized on SiC show characteristic Σ3 twin grain boundaries parallel to the growth direction. The Si crystals achieve widths up to several mm and lengths of several cm. Solar cells made from such material achieved open circuit voltages up to 566 mV on zircon and up to 600 mV on equally processed mc-Si.
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