一种新型被动膜泵纳米钢笔

Youngkwan Lee, Suk-Han Lee, Youn-J. Kim, Hunmo Kim
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引用次数: 6

摘要

本文研究了利用主动膜泵送技术控制纳米钢笔的流量。Dip - Pen纳米光刻技术有一个缺点,那就是在进行宽带图片化涂覆时需要频繁的加载和卸载。这个问题是由于墨量的限制引起的,墨量被束缚在墨头表面。利用主动膜泵在腔室中控制流体注入是解决这一问题的方法。分析了毛细管力作用下通道内的流量,包括悬臂挠度和膜挠度对质量流量的控制。最后,利用纳米压痕装置对膜的偏转进行了实验研究。
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A Novel Passive Membrane Pumping Nano Fountain-Pen
In this paper, flow control of nano fountain pen using active membrane pumping is investigated. DPN (Dip Pen Nano- Lithography) has a shortcoming in which is the need of frequent loading and unloading while coating for broadband patterning. This issue is caused by a limit in quantity of ink, which is tied on the tip surface. The control of fluid injection using active membrane pumping in chambers is the answer of the problem. The flow rates in channels with the presence of capillary force are analyzed including the cantilever deflection and the control of mass flow rates by deflection of membrane. Finally, in this paper, the membrane deflection using a nano indentation equipment has been experimentally examined.
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