{"title":"螺旋型PVDF悬臂振动能量采集器的研制","authors":"Wen Liu, Mengdi Han, Xuming Sun, Haixia Zhang","doi":"10.1109/NEMS.2014.6908849","DOIUrl":null,"url":null,"abstract":"Polyvinylidene fluoride (PVDF) has a strong piezoelectricity. With the piezoelectric coefficient of poled thin films as large as 6-7 pC/N, PVDF is becoming a popular material for the sensors and energy harvesting. However, the fabrication process of PVDF is a big challenge due to the physical and chemical properties of PVDF. In this paper, a spiral-shaped PVDF cantilever is fabricated to harvest vibration energy in the environment. Copper mass and silicon mass are added to the PVDF cantilever to reduce the resonant frequency. Series of MEMS fabrication process are utilized to realize the PVDF piezoelectric energy harvester.","PeriodicalId":22566,"journal":{"name":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","volume":"15 1","pages":"458-461"},"PeriodicalIF":0.0000,"publicationDate":"2014-04-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":"{\"title\":\"Fabrication of spiral-shaped PVDF cantilever based vibration energy harvester\",\"authors\":\"Wen Liu, Mengdi Han, Xuming Sun, Haixia Zhang\",\"doi\":\"10.1109/NEMS.2014.6908849\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Polyvinylidene fluoride (PVDF) has a strong piezoelectricity. With the piezoelectric coefficient of poled thin films as large as 6-7 pC/N, PVDF is becoming a popular material for the sensors and energy harvesting. However, the fabrication process of PVDF is a big challenge due to the physical and chemical properties of PVDF. In this paper, a spiral-shaped PVDF cantilever is fabricated to harvest vibration energy in the environment. Copper mass and silicon mass are added to the PVDF cantilever to reduce the resonant frequency. Series of MEMS fabrication process are utilized to realize the PVDF piezoelectric energy harvester.\",\"PeriodicalId\":22566,\"journal\":{\"name\":\"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)\",\"volume\":\"15 1\",\"pages\":\"458-461\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2014-04-13\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"3\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/NEMS.2014.6908849\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"The 9th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/NEMS.2014.6908849","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Fabrication of spiral-shaped PVDF cantilever based vibration energy harvester
Polyvinylidene fluoride (PVDF) has a strong piezoelectricity. With the piezoelectric coefficient of poled thin films as large as 6-7 pC/N, PVDF is becoming a popular material for the sensors and energy harvesting. However, the fabrication process of PVDF is a big challenge due to the physical and chemical properties of PVDF. In this paper, a spiral-shaped PVDF cantilever is fabricated to harvest vibration energy in the environment. Copper mass and silicon mass are added to the PVDF cantilever to reduce the resonant frequency. Series of MEMS fabrication process are utilized to realize the PVDF piezoelectric energy harvester.
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