低温倒装芯片键合中的电迁移行为

K. Murayama, M. Higashi, T. Sakai, Nobuaki Imaizumi
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引用次数: 11

摘要

在本报告中,我们研究了两种低温键合的电迁移行为。一种是采用常规C4工艺的sn - 57bi。另一种是Au-In瞬态液相键合(TLP)。在150℃下,诱导电迁移的电子流从衬底侧(Ni垫)流向芯片侧(Cu垫),电流密度为40000A/cm2。在Sn- 57bi常规C4工艺中,Bi快速迁移到阳极侧(Cu柱)积累,Sn迁移到阴极侧(衬底Ni垫)。互连电阻增加到150小时左右。虽然该温度高于Sn57 Bi焊料的熔点,但未发生电断失效,且电阻稳定在初始电阻增加80%以上,使用时间超过2800小时,是Sn3.0wt%Ag0.5wt%Cu (SAC305)焊点寿命的10倍。从试验后Sn-57 Bi焊点的截面分析中发现,Bi层和金属间化合物(IMC)是Cu原子向Sn焊点迁移的障碍。在Au-In TLP键合的情况下,金属结构没有明显变化。1300小时以上,电阻稳定在初始值增加0.5%的水平。Sn57 Bi焊料连接和Au-In TLP键合是高密度倒装芯片和3D封装的有前途的键合技术。
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Electro-migration behavior in low temperature flip chip bonding
In this report, we investigated electro-migration behavior of two types of low temperature bonding. One was Sn-57 Bi using conventional C4 process. The other was Au-In Transient Liquid Phase bonding (TLP). Electron flow to induce the electro-migration was from substrate side (Ni pad) to chip side (Cu post) with current density of 40000A/cm2 at 150 degree C. In the case of Sn-57 Bi conventional C4 process, Bi quickly migrated to accumulate on the anode side (Cu post) and Sn migrated to the cathode side (substrate Ni pad). And the interconnect resistance increased until about 150 hours. Although this temperature was higher than the melting point of Sn57 Bi solder, there was no electrically break failure and the resistance was stabilized at 80% increase of initial resistance for more than 2800 hours, that was 10 times longer life of the Sn3.0wt%Ag0.5wt%Cu (SAC305) solder joint. From the cross-sectional analyses of Sn-57 Bi solder joints after the test, it was found that Bi layer and intermetallic compound (IMC) behaved as the barriers of the Cu atom migration into Sn solder. In the case of Au-In TLP bonding, remarkable change was not observed in metallic structure. And resistance was stabilized at 0.5% increase of initial for more than 1300 hours. Sn57 Bi solder joining and Au-In TLP bonding are promising candidates for the bonding technique of high density Flip Chip packages and 3D packages.
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Parasitic electrical and electromagnetic effects Heat management Passive electronic components Interconnection technology Reliability and maintainability
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