宽带电磁干扰屏蔽用透明超薄掺杂银膜

Heyan Wang, Chengang Ji, Cheng Zhang, Yilei Zhang, Zhong Zhang, Zhengang Lu, Jiubin Tan, L. Guo
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引用次数: 0

摘要

提出了一种基于超薄银介电-金属-介电结构的高性能电磁干扰屏蔽膜。在室温下将ITO/ cu掺杂Ag/ITO (ICAI)薄膜沉积在柔性聚对苯二甲酸乙二醇酯(PET)基底上。ICAI薄膜在400 - 700 nm光谱范围内透射96.5 %的可见光(参考PET衬底)。薄膜层具有优异的电磁干扰屏蔽效能(SE),平均屏蔽效率为26 dB,带宽为32 GHz,覆盖了整个X、Ku、Ka和K波段。电介质-金属-电介质设计极大地缓解了光透射率和电磁干扰屏蔽性能之间的权衡。通过将两层ICAI薄膜叠加在一起,可以简单地获得超过30 dB的EMI SE。此外,柔性ICAI薄膜在机械变形下具有稳定的电磁干扰屏蔽性能。ICAI薄膜出色的光学、宽带EMI屏蔽和机械性能使其在医疗保健、电子安全和快速增长的下一代柔性电子产品(如卷式显示器和可穿戴设备)中的各种应用前景广阔。
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Transparent Ultrathin Doped Silver Film for Broadband Electromagnetic Interference Shielding
A high-performance electromagnetic interference (EMI) shielding film based on a dielectric-metal-dielectric structure incorporating ultrathin Silver is proposed. The ITO/Cu-doped Ag/ITO (ICAI) film was deposited on flexible Polyethylene terephthalate (PET) substrates at room temperature. The ICAI film transmits $\sim 96.5$% visible light (reference to PET substrate) over spectral range 400 – 700 nm. The film stack shows an excellent average EMI shielding effectiveness (SE) of $\sim 26$ dB, exhibiting a broadband shielding with the bandwidth of 32 GHz, which covers the entire X, Ku, Ka, and K bands. The dielectric-metal-dielectric design greatly relieves the trade-off between optical transmittance and EMI shielding performances. EMI SE exceeds 30 dB can be simply obtained by stacking two layers of ICAI films together. In addition, the flexible ICAI film demonstrates a stable EMI shielding performance under mechanical deformation. The outstanding optical, broadband EMI shielding and mechanical properties of ICAI film render it promising for various applications in healthcare, electronic safety, and fast-growing next-generation flexible electronics, such as roll-up displays and wearable devices.
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