{"title":"高品质因子-一维光子晶体扩展腔的再现性和自由光谱范围控制","authors":"A. M. Md Zain, B. Majlis, Richard M. De La Rue","doi":"10.1109/RSM.2015.7355023","DOIUrl":null,"url":null,"abstract":"In this paper we report successful experimental demonstration of consistency in controlling the resonance quality factor (Q-factor) value in the range from 1000 to 80,000, together with good free spectral range (FSR) control in the range from 30 nm to 62 nm - for an extended cavity. We have also demonstrated good repeatability of high Q-factor values for 1D photonic crystal (PhC)/Photonic wire (PhW) extended cavities based on Silicon-on-Insulator (SOI) using different fabrication cycles. The cavities that are considered in this paper range from 2 μm to 8.25 μm in length. The Q-factors for each resonance obtained for particular extended cavities have been measured on different occasions, with 5% variation in the Q-value over an extended period of time.","PeriodicalId":6667,"journal":{"name":"2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","volume":"134 1","pages":"1-3"},"PeriodicalIF":0.0000,"publicationDate":"2015-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":"{\"title\":\"Reproducibility and free spectral range (FSR) control of a high quality factor — 1D photonic crystal (PhC) extended cavity\",\"authors\":\"A. M. Md Zain, B. Majlis, Richard M. De La Rue\",\"doi\":\"10.1109/RSM.2015.7355023\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this paper we report successful experimental demonstration of consistency in controlling the resonance quality factor (Q-factor) value in the range from 1000 to 80,000, together with good free spectral range (FSR) control in the range from 30 nm to 62 nm - for an extended cavity. We have also demonstrated good repeatability of high Q-factor values for 1D photonic crystal (PhC)/Photonic wire (PhW) extended cavities based on Silicon-on-Insulator (SOI) using different fabrication cycles. The cavities that are considered in this paper range from 2 μm to 8.25 μm in length. The Q-factors for each resonance obtained for particular extended cavities have been measured on different occasions, with 5% variation in the Q-value over an extended period of time.\",\"PeriodicalId\":6667,\"journal\":{\"name\":\"2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)\",\"volume\":\"134 1\",\"pages\":\"1-3\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2015-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"2\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/RSM.2015.7355023\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2015 IEEE Regional Symposium on Micro and Nanoelectronics (RSM)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/RSM.2015.7355023","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Reproducibility and free spectral range (FSR) control of a high quality factor — 1D photonic crystal (PhC) extended cavity
In this paper we report successful experimental demonstration of consistency in controlling the resonance quality factor (Q-factor) value in the range from 1000 to 80,000, together with good free spectral range (FSR) control in the range from 30 nm to 62 nm - for an extended cavity. We have also demonstrated good repeatability of high Q-factor values for 1D photonic crystal (PhC)/Photonic wire (PhW) extended cavities based on Silicon-on-Insulator (SOI) using different fabrication cycles. The cavities that are considered in this paper range from 2 μm to 8.25 μm in length. The Q-factors for each resonance obtained for particular extended cavities have been measured on different occasions, with 5% variation in the Q-value over an extended period of time.
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