原位氧化导致的高钾钝化层对器件稳定性和迁移率提高的影响

{"title":"原位氧化导致的高钾钝化层对器件稳定性和迁移率提高的影响","authors":"Xianfu Dai, Yumei Jing, Rongqi Wu, Kui Tang, Xiaochi Liu, Jian Sun","doi":"10.1002/pssr.202300162","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":20059,"journal":{"name":"physica status solidi (RRL) – Rapid Research Letters","volume":"21 1","pages":""},"PeriodicalIF":0.0000,"publicationDate":"2023-07-21","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Impact of in‐situ oxidation‐resulted high‐k passivation layer on device stability and mobility improvement\",\"authors\":\"Xianfu Dai, Yumei Jing, Rongqi Wu, Kui Tang, Xiaochi Liu, Jian Sun\",\"doi\":\"10.1002/pssr.202300162\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"\",\"PeriodicalId\":20059,\"journal\":{\"name\":\"physica status solidi (RRL) – Rapid Research Letters\",\"volume\":\"21 1\",\"pages\":\"\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2023-07-21\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"physica status solidi (RRL) – Rapid Research Letters\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1002/pssr.202300162\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"physica status solidi (RRL) – Rapid Research Letters","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1002/pssr.202300162","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}