{"title":"用氦束书写纳米结构","authors":"S. Nowak, T. Pfau, J. Mlynck","doi":"10.1109/CLEOE.1996.562399","DOIUrl":null,"url":null,"abstract":"It is of considerable ttduiologicid iiitrrcst how new proccsscs for nanofabrication can be sed to go Ixyond resolution limits 01 optical litliugraphy. The rcquireincnts for such new tcdinologies arc high resolution, paralld writing m d thc possibility to form aperiodic structures. 111 our apliroadi to atom lithography we USE a rcsist tediiiique to burn pattcriis into a litliograpliic sample, where we make use ai the large internal energy (20 eV) of metastable hcliuin. For this trduiiqiie a tliin (1.5 nzn) self-assembliiig nionolaycr (SAM) of dodccmcthiolate molecules is de ositcd on a gold saniplc, wliidi is then stmcturccl by Augcr-drexcitation of He*-ntoms that hit the layer! This spatially damaged layer s e r w as a rcsist for a wet-dimnical etching process (sce fig.l(a)-(d)). In a first experinleiit we were able to copy a mask into lhc gold layer (SCT figure) and adiicved an edge resolution of less than 80 nni (see fig.l(c)!(f)). The nec~ssary dose for exposure corrcspondcd to one He'-atom per SAM-inoleciile, whidi means in our setup an rxposiirc tiinc of 8 niinutcs. In the next cxpcrinicnt.al step wc r i l l realize a pinhole camera for metastable helium whidi will allow us to produce structure^ in thc order of 30-50 inn by dernagnification of \"mcsoscopic\" (total sire 200 pm, fcature s i x 10 p i ) objects by a factor of 50-100. The scheme of a pinhole camera hears sevcral advantagcs besides its simple setup, as there me: the absence of any chromatic aberrations and the possibility to form pictura of npcriodic objects.","PeriodicalId":11780,"journal":{"name":"EQEC'96. 1996 European Quantum Electronic Conference","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2002-08-06","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Writing Nanostructures with a Helium Beam\",\"authors\":\"S. Nowak, T. Pfau, J. Mlynck\",\"doi\":\"10.1109/CLEOE.1996.562399\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"It is of considerable ttduiologicid iiitrrcst how new proccsscs for nanofabrication can be sed to go Ixyond resolution limits 01 optical litliugraphy. The rcquireincnts for such new tcdinologies arc high resolution, paralld writing m d thc possibility to form aperiodic structures. 111 our apliroadi to atom lithography we USE a rcsist tediiiique to burn pattcriis into a litliograpliic sample, where we make use ai the large internal energy (20 eV) of metastable hcliuin. For this trduiiqiie a tliin (1.5 nzn) self-assembliiig nionolaycr (SAM) of dodccmcthiolate molecules is de ositcd on a gold saniplc, wliidi is then stmcturccl by Augcr-drexcitation of He*-ntoms that hit the layer! This spatially damaged layer s e r w as a rcsist for a wet-dimnical etching process (sce fig.l(a)-(d)). In a first experinleiit we were able to copy a mask into lhc gold layer (SCT figure) and adiicved an edge resolution of less than 80 nni (see fig.l(c)!(f)). The nec~ssary dose for exposure corrcspondcd to one He'-atom per SAM-inoleciile, whidi means in our setup an rxposiirc tiinc of 8 niinutcs. In the next cxpcrinicnt.al step wc r i l l realize a pinhole camera for metastable helium whidi will allow us to produce structure^ in thc order of 30-50 inn by dernagnification of \\\"mcsoscopic\\\" (total sire 200 pm, fcature s i x 10 p i ) objects by a factor of 50-100. The scheme of a pinhole camera hears sevcral advantagcs besides its simple setup, as there me: the absence of any chromatic aberrations and the possibility to form pictura of npcriodic objects.\",\"PeriodicalId\":11780,\"journal\":{\"name\":\"EQEC'96. 1996 European Quantum Electronic Conference\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2002-08-06\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"EQEC'96. 1996 European Quantum Electronic Conference\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CLEOE.1996.562399\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"EQEC'96. 1996 European Quantum Electronic Conference","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOE.1996.562399","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
It is of considerable ttduiologicid iiitrrcst how new proccsscs for nanofabrication can be sed to go Ixyond resolution limits 01 optical litliugraphy. The rcquireincnts for such new tcdinologies arc high resolution, paralld writing m d thc possibility to form aperiodic structures. 111 our apliroadi to atom lithography we USE a rcsist tediiiique to burn pattcriis into a litliograpliic sample, where we make use ai the large internal energy (20 eV) of metastable hcliuin. For this trduiiqiie a tliin (1.5 nzn) self-assembliiig nionolaycr (SAM) of dodccmcthiolate molecules is de ositcd on a gold saniplc, wliidi is then stmcturccl by Augcr-drexcitation of He*-ntoms that hit the layer! This spatially damaged layer s e r w as a rcsist for a wet-dimnical etching process (sce fig.l(a)-(d)). In a first experinleiit we were able to copy a mask into lhc gold layer (SCT figure) and adiicved an edge resolution of less than 80 nni (see fig.l(c)!(f)). The nec~ssary dose for exposure corrcspondcd to one He'-atom per SAM-inoleciile, whidi means in our setup an rxposiirc tiinc of 8 niinutcs. In the next cxpcrinicnt.al step wc r i l l realize a pinhole camera for metastable helium whidi will allow us to produce structure^ in thc order of 30-50 inn by dernagnification of "mcsoscopic" (total sire 200 pm, fcature s i x 10 p i ) objects by a factor of 50-100. The scheme of a pinhole camera hears sevcral advantagcs besides its simple setup, as there me: the absence of any chromatic aberrations and the possibility to form pictura of npcriodic objects.