K. Sakuma, Huan Hu, S. Bedell, B. Webb, S. Wright, K. Latzko, M. Agno, J. Knickerbocker
{"title":"用剥落技术制备柔性压阻传感器","authors":"K. Sakuma, Huan Hu, S. Bedell, B. Webb, S. Wright, K. Latzko, M. Agno, J. Knickerbocker","doi":"10.1109/IFETC.2018.8583971","DOIUrl":null,"url":null,"abstract":"In this research study, we present comprehensive characterizations of flexible silicon sensors fabricated using controlled spalling which uses fracture to produce thin films of single-crystal silicon directly from a bulk substrate. We characterized the property of the thin silicon film for sensing strain and temperature. The flexible sensor exhibits high sensitivity with a temperature coefficient of resistance of −0.16/°C, which is desirable for targeted health monitoring applications.","PeriodicalId":6609,"journal":{"name":"2018 International Flexible Electronics Technology Conference (IFETC)","volume":"1 1","pages":"1-2"},"PeriodicalIF":0.0000,"publicationDate":"2018-08-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Flexible Piezoresistive Sensors Fabricated by Spalling Technique\",\"authors\":\"K. Sakuma, Huan Hu, S. Bedell, B. Webb, S. Wright, K. Latzko, M. Agno, J. Knickerbocker\",\"doi\":\"10.1109/IFETC.2018.8583971\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"In this research study, we present comprehensive characterizations of flexible silicon sensors fabricated using controlled spalling which uses fracture to produce thin films of single-crystal silicon directly from a bulk substrate. We characterized the property of the thin silicon film for sensing strain and temperature. The flexible sensor exhibits high sensitivity with a temperature coefficient of resistance of −0.16/°C, which is desirable for targeted health monitoring applications.\",\"PeriodicalId\":6609,\"journal\":{\"name\":\"2018 International Flexible Electronics Technology Conference (IFETC)\",\"volume\":\"1 1\",\"pages\":\"1-2\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2018-08-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2018 International Flexible Electronics Technology Conference (IFETC)\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/IFETC.2018.8583971\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2018 International Flexible Electronics Technology Conference (IFETC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IFETC.2018.8583971","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Flexible Piezoresistive Sensors Fabricated by Spalling Technique
In this research study, we present comprehensive characterizations of flexible silicon sensors fabricated using controlled spalling which uses fracture to produce thin films of single-crystal silicon directly from a bulk substrate. We characterized the property of the thin silicon film for sensing strain and temperature. The flexible sensor exhibits high sensitivity with a temperature coefficient of resistance of −0.16/°C, which is desirable for targeted health monitoring applications.
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