{"title":"脉冲直流磁控溅射制备ZrAlN薄膜的微观结构、纳米力学和摩擦学性能","authors":"P. Kuppusami, Akash Singh, E. Mohandas","doi":"10.1109/ICANMEET.2013.6609232","DOIUrl":null,"url":null,"abstract":"An investigation on the structural, nano-mechanical and tribological properties of thin films of ZrAlN deposited on (100) Si and D-9 alloy substrates prepared by pulsed DC magnetron is reported. Zr1-xAlxNy films have been studied with the Al concentration range of 0<;x<;0.36 Al. It was observed that values of hardness and Young's modulus of the alloyed ZrAlN films were in the range 9-18 GPa and 235-365 GPa, respectively. Tribological studies of ZrAlN thin film showed that the coefficient of friction of alloyed films of ZrAlN was lower for the steel ball (100Cr6 steel) than that for the Al2O3 ball up to 36 at.% of Al.","PeriodicalId":13708,"journal":{"name":"International Conference on Advanced Nanomaterials & Emerging Engineering Technologies","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2013-07-24","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":"{\"title\":\"Microstructural, nanomechanical and tribological properties of ZrAlN thin films prepared by pulsed DC magnetron sputtering\",\"authors\":\"P. Kuppusami, Akash Singh, E. Mohandas\",\"doi\":\"10.1109/ICANMEET.2013.6609232\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"An investigation on the structural, nano-mechanical and tribological properties of thin films of ZrAlN deposited on (100) Si and D-9 alloy substrates prepared by pulsed DC magnetron is reported. Zr1-xAlxNy films have been studied with the Al concentration range of 0<;x<;0.36 Al. It was observed that values of hardness and Young's modulus of the alloyed ZrAlN films were in the range 9-18 GPa and 235-365 GPa, respectively. Tribological studies of ZrAlN thin film showed that the coefficient of friction of alloyed films of ZrAlN was lower for the steel ball (100Cr6 steel) than that for the Al2O3 ball up to 36 at.% of Al.\",\"PeriodicalId\":13708,\"journal\":{\"name\":\"International Conference on Advanced Nanomaterials & Emerging Engineering Technologies\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2013-07-24\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"1\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"International Conference on Advanced Nanomaterials & Emerging Engineering Technologies\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/ICANMEET.2013.6609232\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"International Conference on Advanced Nanomaterials & Emerging Engineering Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICANMEET.2013.6609232","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Microstructural, nanomechanical and tribological properties of ZrAlN thin films prepared by pulsed DC magnetron sputtering
An investigation on the structural, nano-mechanical and tribological properties of thin films of ZrAlN deposited on (100) Si and D-9 alloy substrates prepared by pulsed DC magnetron is reported. Zr1-xAlxNy films have been studied with the Al concentration range of 0<;x<;0.36 Al. It was observed that values of hardness and Young's modulus of the alloyed ZrAlN films were in the range 9-18 GPa and 235-365 GPa, respectively. Tribological studies of ZrAlN thin film showed that the coefficient of friction of alloyed films of ZrAlN was lower for the steel ball (100Cr6 steel) than that for the Al2O3 ball up to 36 at.% of Al.
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