{"title":"无晶圆键合的双向刻蚀Woodpile光子晶体纳米腔","authors":"Lingling Tang, T. Yoshie","doi":"10.1109/CLEOPR.2009.5292417","DOIUrl":null,"url":null,"abstract":"Compact ultra-high-Q modes are designed in a woodpile photonic crystal by mudulating unit cell size along a waveguide in a complete photonic band gap. These designs provide a means of simplifying the fabrication of woodpile photonic crystal nanocavities. The designed nanocavities are fabricated with a two-directional etching approach without wafer bonding.","PeriodicalId":6452,"journal":{"name":"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics","volume":null,"pages":null},"PeriodicalIF":0.0000,"publicationDate":"2009-10-30","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":"{\"title\":\"Woodpile photonic crystal nanocavity by two-directional etching without wafer bonding\",\"authors\":\"Lingling Tang, T. Yoshie\",\"doi\":\"10.1109/CLEOPR.2009.5292417\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"Compact ultra-high-Q modes are designed in a woodpile photonic crystal by mudulating unit cell size along a waveguide in a complete photonic band gap. These designs provide a means of simplifying the fabrication of woodpile photonic crystal nanocavities. The designed nanocavities are fabricated with a two-directional etching approach without wafer bonding.\",\"PeriodicalId\":6452,\"journal\":{\"name\":\"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics\",\"volume\":null,\"pages\":null},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2009-10-30\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"0\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/CLEOPR.2009.5292417\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 Conference on Lasers & Electro Optics & The Pacific Rim Conference on Lasers and Electro-Optics","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CLEOPR.2009.5292417","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Woodpile photonic crystal nanocavity by two-directional etching without wafer bonding
Compact ultra-high-Q modes are designed in a woodpile photonic crystal by mudulating unit cell size along a waveguide in a complete photonic band gap. These designs provide a means of simplifying the fabrication of woodpile photonic crystal nanocavities. The designed nanocavities are fabricated with a two-directional etching approach without wafer bonding.
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