Alasatri Suresh, Ko Lok Mak, J. Benserhir, Joshua E-Y Lee, L. Rufer
{"title":"基于多用户MEMS工艺制造的双电极PMUT的米级探测距离空气耦合超声测距仪","authors":"Alasatri Suresh, Ko Lok Mak, J. Benserhir, Joshua E-Y Lee, L. Rufer","doi":"10.1109/SENSORS43011.2019.8956530","DOIUrl":null,"url":null,"abstract":"This work demonstrates the feasibility of an ultrasonic rangefinder with a sensing range of up to 1.5m based on a single piezoelectric micromachined ultrasonic transducer (PMUT) fabricated using a multi-user MEMS process (MUMPs). The dual-electrode design presented herein has been used to isolate the transmit (TX) and received (RX) paths within a single PMUT, thereby avoiding issues of frequency mismatch that is common to dual-PMUT designs. The reported ultrasonic rangefinder has a minimum detection limit of 0.3m.","PeriodicalId":6710,"journal":{"name":"2019 IEEE SENSORS","volume":"86 1","pages":"1-4"},"PeriodicalIF":0.0000,"publicationDate":"2019-10-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"6","resultStr":"{\"title\":\"Air-coupled Ultrasonic Rangefinder with Meter-long Detection Range Based on a Dual-electrode PMUT Fabricated Using a Multi-user MEMS Process\",\"authors\":\"Alasatri Suresh, Ko Lok Mak, J. Benserhir, Joshua E-Y Lee, L. Rufer\",\"doi\":\"10.1109/SENSORS43011.2019.8956530\",\"DOIUrl\":null,\"url\":null,\"abstract\":\"This work demonstrates the feasibility of an ultrasonic rangefinder with a sensing range of up to 1.5m based on a single piezoelectric micromachined ultrasonic transducer (PMUT) fabricated using a multi-user MEMS process (MUMPs). The dual-electrode design presented herein has been used to isolate the transmit (TX) and received (RX) paths within a single PMUT, thereby avoiding issues of frequency mismatch that is common to dual-PMUT designs. The reported ultrasonic rangefinder has a minimum detection limit of 0.3m.\",\"PeriodicalId\":6710,\"journal\":{\"name\":\"2019 IEEE SENSORS\",\"volume\":\"86 1\",\"pages\":\"1-4\"},\"PeriodicalIF\":0.0000,\"publicationDate\":\"2019-10-01\",\"publicationTypes\":\"Journal Article\",\"fieldsOfStudy\":null,\"isOpenAccess\":false,\"openAccessPdf\":\"\",\"citationCount\":\"6\",\"resultStr\":null,\"platform\":\"Semanticscholar\",\"paperid\":null,\"PeriodicalName\":\"2019 IEEE SENSORS\",\"FirstCategoryId\":\"1085\",\"ListUrlMain\":\"https://doi.org/10.1109/SENSORS43011.2019.8956530\",\"RegionNum\":0,\"RegionCategory\":null,\"ArticlePicture\":[],\"TitleCN\":null,\"AbstractTextCN\":null,\"PMCID\":null,\"EPubDate\":\"\",\"PubModel\":\"\",\"JCR\":\"\",\"JCRName\":\"\",\"Score\":null,\"Total\":0}","platform":"Semanticscholar","paperid":null,"PeriodicalName":"2019 IEEE SENSORS","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSORS43011.2019.8956530","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
Air-coupled Ultrasonic Rangefinder with Meter-long Detection Range Based on a Dual-electrode PMUT Fabricated Using a Multi-user MEMS Process
This work demonstrates the feasibility of an ultrasonic rangefinder with a sensing range of up to 1.5m based on a single piezoelectric micromachined ultrasonic transducer (PMUT) fabricated using a multi-user MEMS process (MUMPs). The dual-electrode design presented herein has been used to isolate the transmit (TX) and received (RX) paths within a single PMUT, thereby avoiding issues of frequency mismatch that is common to dual-PMUT designs. The reported ultrasonic rangefinder has a minimum detection limit of 0.3m.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
