高产量自对准倒装芯片组装的焊料迁移率

Y. Martin, S. Kamlapurkar, J. Nah, N. Marchack, T. Barwicz
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引用次数: 5

摘要

亚微米精度的自对准倒装芯片组装对于单模光电元件的低成本制造尤为重要。通过熔化焊料的表面张力进行对准的概念在二十多年前就提出了,而且看起来很简单。然而,它要想有效地应用于制造业,需要解决几个基本问题。在之前的工作中,我们介绍了焊料储存器的概念,它提供了焊料体积自平衡机制,以显着提高自对准良率。在本文中,我们表明,当焊盘的焊料润湿或焊盘与焊盘之间的焊料流动性受到限制时,焊盘的有效性受到阻碍。因此,我们研究了各种各样的金属堆,并确定了大量润湿和焊料流动性改善的候选材料。我们使用传统的润湿角度以及沿着狭窄轨道的润湿速度对金属堆的焊料迁移率进行了排名。第一个测试部件,用改进的金属堆制造,显示出预期的好处,提高了芯片对准的产量。
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Solder Mobility for High-Yield Self-Aligned Flip-Chip Assembly
Self-aligned flip-chip assembly with sub-micron accuracy is of particular importance to low-cost manufacturing of single-mode opto-electronic components. The concept of alignment via surface tension force of melted solder has been proposed over two decades ago and appears simple. Yet, its effective working into manufacturing requires solving a few fundamental issues. In prior work, we introduced the concept of solder reservoirs which provide a solder volume self-balancing mechanism to notably enhance self-alignment yield. In this paper, we show that the effectiveness of reservoirs is impeded when the solder wetting of pads or the solder mobility between pads and reservoirs is limited. We therefore studied a wide variety of metal stacks and identified candidates for substantial wetting and solder mobility improvement. We ranked the metal stacks for solder mobility using traditional wetting angles as well as speed of wetting along narrow tracks. First test parts, manufactured with the improved metal stacks, show the expected benefit in increased yield for chip alignment.
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