用于抑制长期土壤监测pH值测量漂移的条纹栅式pH传感器的研制

2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) Pub Date : 2019-06-23 DOI:10.1109/TRANSDUCERS.2019.8808728

M. Futagawa, Keisuke Uemura, Ryuta Oishi, S. Ota, H. Hirano

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引用次数: 0

摘要

制作了一种具有条纹栅电极抑制漂移的isfet型pH传感器，用于长期测量pH值。在FET的沟道区域内，在pH传感膜下制备了条纹栅电极的线和空间图案。在栅极上施加电压以抑制来自物体溶液的阴离子在传感膜中的扩散。我们证实了栅极电极对漂移的抑制作用。

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Fabrication of a Stripe-Gate Type pH Sensor for Inhibition of Drift in pH Measurement for Long-Term Soil Monitoring

An ISFET-type pH sensor with stripe gate electrodes to inhibit the drift was fabricated for long-term pH measurement. The line and space patterns of stripe gate electrodes were fabricated under the pH sensing membrane in a channel area of the FET. The voltage was applied to the gate electrodes to suppress the diffusions of the anions from the object solution in the sensing membrane. We confirmed the inhibition of the drift using the gate electrodes.

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2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems & Eurosensors XXXIII (TRANSDUCERS & EUROSENSORS XXXIII)

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