多孔硅层效应对晶体硅光电性能的影响

IF 1.3 4区 化学 Q4 CHEMISTRY, INORGANIC & NUCLEAR Phosphorus, Sulfur, and Silicon and the Related Elements Pub Date : 2023-11-02 Epub Date: 2023-08-12 DOI:10.1080/10426507.2023.2219805
Mouna Jemli , Bilel Abdouli , Lotfi Khezami , Mohamed Ben Rabha
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引用次数: 0

摘要

在本研究中,我们通过实验和数值证明了表面多孔硅层对多晶硅光电子性能的有益影响。采用气相蚀刻法制备了富氢富氧多孔硅层。通过激光诱导电流(LBIC)模拟,我们发现富氢富氧多孔硅层用于mc-Si表面具有良好的表面钝化效果,是改善电子质量和光电子性能的潜在候选材料。结果,经过处理的硅产生的电流是基准衬底的5倍,导致少数载流子扩散长度增加50%,少数载流子的复合速度降低25%,反射率从相关样品的38%降低到3%。
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Study of porous silicon layer effect in optoelectronics properties of crystalline silicon
In this research, we experimentally and numerically demonstrate the beneficial effect of superficial porous silicon layer in the optoelectronics properties of multi-crystalline silicon. The hydrogen and oxygen-rich porous silicon layer was formed using vapor etching method. From laser beam induced current (LBIC) simulations, we found that the hydrogen and oxygen-rich porous silicon layer used in mc-Si surface acts as a good surface passivation and a potential candidate for electronic quality and optoelectronics properties improvement. As a result, the generated current of treated silicon is 5 times greater as compared to reference substrate, which led to a 50% increase of the minority carrier diffusion length, 25% decrease in the recombination velocity of the minority carrier and the reflectivity reduced from 38 to 3% of the related sample.
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来源期刊
CiteScore
2.60
自引率
7.70%
发文量
103
审稿时长
2.1 months
期刊介绍: Phosphorus, Sulfur, and Silicon and the Related Elements is a monthly publication intended to disseminate current trends and novel methods to those working in the broad and interdisciplinary field of heteroatom chemistry.
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