矩形表面上的薄片电阻率测量。四点探头转换系数的通解

M. A. Logan
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引用次数: 16

摘要

电压电流比是用在均匀导电片表面的探针测量的,通过“转换因子”转换成每平方的电阻。对于矩形,通过使用复雅可比正弦振幅函数$x + iy\ =\ {\rm sn}[(u+iv),k]$作为变换得到这些因子的封闭形式解。经过变换后,绝缘边矩形变成半无限大片。两个共轭电流点图像建立了边界条件。双面矩形直接成为无限大的薄片,不需要图像。新的表已经准备了一个模式的探针中心位置均匀分布在表面上。为这些表选择的探头是一种常见的布置,在与矩形较长的边缘平行的一条线上有四个等间距的点。
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Sheet resistivity measurements on rectangular surfaces–general solution for four point probe conversion factors
Voltage-current ratios, measured using probes on the surface of a homogeneous conducting sheet, are converted to resistance per square by “conversion factors”. For rectangles, a closed form solution for these factors is obtained by using the complex Jacobian sine-amplitude function $x + iy\ =\ {\rm sn}[(u+iv),k]$ as a transformation. After transformation, an insulated edge rectangle becomes a semi-infinite sheet. Two conjugate current point images establish the boundary condition. A double-sided rectangle becomes an infinite sheet directly, needing no images. New tables have been prepared for a pattern of probe center locations uniformly distributed over the surface. The probe chosen for these tables is a common arrangement having four equally spaced points on a line parallel to the longer edge of the rectangle.
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