用于高少数载流子寿命材料的硅浮子带晶体生长

T.F. Ciszek
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引用次数: 1

摘要

许多电子器件的性能,如太阳能电池、功率器件和晶体管,在半导体材料中受到少数载流子寿命的强烈影响。这些器件的硅晶体的浮区生长条件可以调整,以实现长达20毫秒的载流子寿命。低杂质水平当然是必要的,而且材料必须没有位错和晶界。微缺陷如漩涡缺陷(A型或b型)和冻结缺陷也是载流子复合中心,因此必须在晶体生长过程中加以控制。缺陷的类型和密度可以通过改变生长条件来改变。在晶体生长过程中,在适度高的生长速率和低的热梯度下实现了长少数载流子寿命。
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Silicon float-zoned crystal growth for high minority charge-carrier lifetime material applications

The performance of a number of electronic devices such as solar cells, power devices, and transistors is strongly influenced by minority charge-carrier lifetimes in the semi-conductor material. The conditions for float-zone growth of silicon crystals for these devices can be adjusted to achieve charge-carrier lifetimes as long as 20 ms. Low impurity levels are of course necessary, and the material must be free of dislocations and grain boundaries. Microdefects such as swirl defects (A- or B-type) and frozen-in defects are also carrier recombination centers, and thus must be controlled during crystal growth. The type and density of defects can be altered by changing the growth conditions. Long minority charge-carrier lifetimes are achieved at moderately high growth rates and low thermal gradients during crystal growth.

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