质子束写作:乌克兰的世界经验和前景

IF 0.4 Q4 PHYSICS, NUCLEAR Nuclear Physics and Atomic Energy Pub Date : 2023-03-25 DOI:10.15407/jnpae2023.01.072
H. Polozhii, A. Ponomarev, S. Kolinko, V. Rebrov, R. O. Shulipa, O. Kalinkevich, O.V. Kalinkevich
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引用次数: 0

摘要

质子束刻字是一种很有前途的光刻方法,目前正在许多国家得到发展。与其他光刻方法相比,该方法具有显著的优点,其中包括不需要预制图案掩模和制造结构的高纵横比。许多出版物展示了质子束写入在与微纳米结构制造相关的不同领域的潜在应用。质子束写入既可用于纳米电子学,也可用于高纵横比的三维微结构。质子束书写技术的研究工作正在乌克兰国家科学院应用物理研究所进行。近年来介绍了矢量质子束写入方法、质子束畸变的静电屏蔽系统,并在壳聚糖薄膜上进行了质子束写入实验,包括在金属薄膜和金属化合物薄膜上的质子束写入实验。
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Proton beam writing: World experience and prospectives in Ukraine
Proton beam writing is a promising lithography method that is being developed in many countries. This method has significant advantages over other lithography methods, amongst all, there is the absence of the need for prefabricated pattern masks and a high aspect ratio of fabricated structures. Numerous publications demonstrate prospective applications of proton beam writing in different fields related to micro- and nanostructures fabrication. Proton beam writing may be used both for nanoelectronics and three-dimensional microstructures with a high aspect ratio. Work on proton beam writing technology is being conducted at the Institute of Applied Physics of the National Academy of Sciences of Ukraine. Last years there were introduced vector proton beam writing method, an electrostatic blanker system for proton beam distortion, and experiments on proton beam writing on chitosan films were conducted, including the films covered with thin films of metals and metal compounds.
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来源期刊
CiteScore
0.70
自引率
33.30%
发文量
10
审稿时长
19 weeks
期刊介绍: The journal Nuclear Physics and Atomic Energy presents the publications on Nuclear Physics, Atomic Energy, Radiation Physics, Radioecology, Engineering and Methods of Experiment. The journal includes peer-reviewed articles which are completed works containing new results of theoretical and experimental researches and are of interest for the scientists, postgraduate students, engineers and for the senior students.
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