硅上III-V集成用BGa(As)P合金(会议报告)

C. R. Fitch, P. Ludewig, W. Stolz, S. Sweeney
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摘要

在硅上单片生长III-V型半导体是硅基激光器发展的一条很有前途的途径。GaP二元体的晶格常数与硅的晶格常数非常接近,可以在(001)精确取向的硅衬底上无缺陷生长,没有反相畴(APDs)或层错。这些硅模板上的GaP为III-V激光器的生长和研究提供了基础。硼的加入可以部分取代镓,进一步降低晶格常数。这可以通过添加As来部分取代p来平衡以匹配硅的晶格常数。合金还提供了带隙和带偏移以及折射率的控制。BxGa(1-x)P和BxGa(1-x)AsyP(1-y)合金具有晶格匹配/应变补偿、包层和独立受限异质结构(SCH)。硼包合物对器件相关合金性能的影响还没有得到广泛的研究,也没有得到很好的理解。我们利用椭偏光谱研究了这些含硼合金的折射率和消光系数色散关系以及电子带结构特性,为器件建模和优化提供了输入。利用椭圆偏振光谱分析了在GaP衬底和GaP/ Si模板上制备的硼含量为0 ~ 6.6%、砷含量为0 ~ 17%的BGaP和BGaAsP合金样品。这些结果为设计具有强光学和电子约束的激光器提供了重要的信息。
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BGa(As)P alloys for III-V integration on silicon (Conference Presentation)
Monolithic growth of III-V semiconductors on silicon is a promising path for the development of silicon-based lasers. The GaP binary has a lattice constant very close to that of silicon and can be grown defect free without anti-phase domains (APDs) or stacking faults on (001) exact orientated silicon substrates. These GaP on Si templates provide the base for growth and investigation of III-V lasers. The addition of boron can be used to partially replace Ga and further reduce the lattice constant. This can be balanced to match the lattice constant of silicon by adding As to partially replace P. The alloying also provides control of band gaps and band offsets as well as refractive index. The BxGa(1-x)P and BxGa(1-x)AsyP(1-y) alloys are being explored to provide lattice matching/ strain compensation, cladding and the Separate Confined Heterostructure (SCH). The effects of the inclusion of boron on device related alloy properties have not been studied extensively and are not well understood. We investigate the refractive index and extinction coefficient dispersion relation and the electronic band structure properties of these boron containing alloys using spectroscopic ellipsometry to provide inputs for device modelling and optimisation. Results from the spectroscopic ellipsometry are presented for a series of BGaP and BGaAsP alloy samples with boron fractions in the range 0-6.6% and arsenic fractions from 0-17% on GaP substrates and GaP/ Si templates. These results provide important information for the design of lasers with strong optical and electronic confinement, as shall be discussed.
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