二维多层六方氮化硼薄膜的热稳定性、功函数及费米能级分析

IF 2.6 4区 工程技术 Q2 ENGINEERING, ELECTRICAL & ELECTRONIC Microelectronic Engineering Pub Date : 2023-10-21 DOI:10.1016/j.mee.2023.112106
Shambel Abate Marye, Ravi Ranjan Kumar, Artur Useinov, Niall Tumilty
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引用次数: 0

摘要

研究了常温化学气相沉积(APCVD)在Cu箔上制备的10 nm厚六方氮化硼(hBN)膜和商用多层(ML)膜的热稳定性和费米能级分析。在所有样品中,观察到渐进式表面氧化与较高的hBN成核密度相关。在200°C至400°C(相对湿度~ 65%)的空气中测量热稳定性,其中商用ML和APCVD材料降解;在300℃时,BN峰开始被BO峰所取代。结果表明,hBN的热稳定性对Tgrowth和电抛光(EP)等铜箔表面制备方法非常敏感。我们通过紫外光电子能谱(UPS)对不同t生长条件(1000°C, 1030°C, 1050°C和1060°C)下的生长材料进行了评估,以定位和了解随后的费米能级和功函数变化,确认我们的材料一般为n型,随着热稳定性的回归,n型变得越来越多。为此,我们观察到随着原位退火温度的升高,BO的功函数增加了0.45 eV。商用hBN和APCVD材料的平均电子亲和力分别为2.13 eV和1.7 eV。材料科学家需要进一步的工作来优化CVD hBN的材料性能。
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Thermal stability, work function and Fermi level analysis of 2D multi-layered hexagonal boron nitride films

Thermal stability and Fermi level analysis of commercial multilayer (ML) and as-grown 10 nm thick hexagonal boron nitride (hBN) films on Cu foil by atmospheric chemical vapor deposition (APCVD) by heating in N2 and air at temperatures ≤900 °C are studied. For all samples, progressive surface oxidation was observed correlating with higher hBN nucleation density. Thermal stability was measured in air from 200 °C to 400 °C (relative humidity 65%) where commercial ML and APCVD material degraded; BN peaks begin to be replaced by BO peaks at temperatures >300 °C. It is shown that hBN thermal stability is sensitive to Tgrowth and Cu foil surface preparation methods such as electropolishing (EP). We evaluate as-grown material for different Tgrowth conditions (1000 °C, 1030 °C, 1050 °C and 1060 °C) by ultraviolet photoelectron spectroscopy (UPS) to locate and understand subsequent Fermi level and work function variation, confirming our material is in general n-type, which becomes increasingly so as thermal stability regresses. To this effect, we observe a work function increase of 0.45 eV as BO increases with in-situ anneal temperature. An average electron affinity of 2.13 eV and 1.7 eV is determined for commercial hBN and APCVD material, respectively. Further work is required by material scientists to optimize the material properties of CVD hBN.

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来源期刊
Microelectronic Engineering
Microelectronic Engineering 工程技术-工程:电子与电气
CiteScore
5.30
自引率
4.30%
发文量
131
审稿时长
29 days
期刊介绍: Microelectronic Engineering is the premier nanoprocessing, and nanotechnology journal focusing on fabrication of electronic, photonic, bioelectronic, electromechanic and fluidic devices and systems, and their applications in the broad areas of electronics, photonics, energy, life sciences, and environment. It covers also the expanding interdisciplinary field of "more than Moore" and "beyond Moore" integrated nanoelectronics / photonics and micro-/nano-/bio-systems. Through its unique mixture of peer-reviewed articles, reviews, accelerated publications, short and Technical notes, and the latest research news on key developments, Microelectronic Engineering provides comprehensive coverage of this exciting, interdisciplinary and dynamic new field for researchers in academia and professionals in industry.
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