2005 IEEE International Integrated Reliability Workshop

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Charge trapping dependence on the physical structure of ultra-thin ALD-HfSiON/TiN gate stacks

Pub Date : 2005-12-01 DOI: 10.1109/IRWS.2005.1609570 S. Krishnan, M. Quevedo-López, R. Choi, P. Kirsch, C. Young, R. Harris, J. Peterson, Hong-jyh Li, B. Lee, J.C. Lee

Characterization and modeling NBTI for design-in reliability

Pub Date : 2005-10-17 DOI: 10.1109/IRWS.2005.1609593 C. Parthasarathy, M. Denais, V. Huard, G. Ribes, E. Vincent, A. Bravaix

Detection of trap generation in high-k gate stacks

Pub Date : 2005-10-17 DOI: 10.1109/IRWS.2005.1609568 C. Young, D. Heh, S. Nadkarni, R. Choi, J. Peterson, H. Harris, J. Sim, S. Krishnan, J. Barnett, E. Vogel, B. Lee, P. Zeitzoff, G.A. Brown, G. Bersuker

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