IEEE 1995 International Integrated Reliability Workshop. Final Report

Particulate contamination control in plasma processing: building-in reliability for semiconductor fabrication

Pub Date : 1995-12-31 DOI: 10.1109/IRWS.1995.493585 G. Selwyn

A new approach for predicting AC hot carrier lifetime

Pub Date : 1995-10-22 DOI: 10.1109/IRWS.1995.493586 H. Kato

A case study in a 100/spl times/reduction in sodium ions in a 0.8 /spl mu/m BiCMOS process using triangular voltage sweep

Pub Date : 1995-10-22 DOI: 10.1109/IRWS.1995.493574 L. Anderson, S. Parikh, S. Nagalingam, C. Haidinyak