{"title":"Temperature control of a rapid thermal processor based on receding horizon control","authors":"Y. I. Lee, Jinhyeok Jang","doi":"10.1109/ISIE.2001.931650","DOIUrl":null,"url":null,"abstract":"In this paper, application of the receding horizon tracking control (RHTC) to the temperature control of a rapid thermal processor (RTP) is considered. Discrete time models of the plant are identified through relay control. The control horizon of the RHTC is chosen to cover 1 sec time and weights are used to lay penalty not only on the tracking errors but also on the discrepancy of outputs. Experimental results were obtained for 8 inch RTP based on SISO models and its extension to the TITO (two inputs two output) model is considered and tested for a simple test equipment.","PeriodicalId":124749,"journal":{"name":"ISIE 2001. 2001 IEEE International Symposium on Industrial Electronics Proceedings (Cat. No.01TH8570)","volume":"22 26","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2001-06-12","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"ISIE 2001. 2001 IEEE International Symposium on Industrial Electronics Proceedings (Cat. No.01TH8570)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ISIE.2001.931650","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
In this paper, application of the receding horizon tracking control (RHTC) to the temperature control of a rapid thermal processor (RTP) is considered. Discrete time models of the plant are identified through relay control. The control horizon of the RHTC is chosen to cover 1 sec time and weights are used to lay penalty not only on the tracking errors but also on the discrepancy of outputs. Experimental results were obtained for 8 inch RTP based on SISO models and its extension to the TITO (two inputs two output) model is considered and tested for a simple test equipment.
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