{"title":"Correction of Nonlinearity in High-Resolution Nano-Displacement Measurements","authors":"S. Olyaee, S. Hamedi","doi":"10.1109/HONET.2008.4810220","DOIUrl":null,"url":null,"abstract":"In this paper, a simple method to reduce the nonlinearity in the high-resolution nano-displacement measuring system using a modified laser interferometer is presented. By using a retarder plate and improved optical head, in additional to the nonlinearity compensation, the resolution of the displacement measurement is doubled and quadrupled compared to the conventional three- and two-mode laser interferometers, respectively. In the particular case, the nonlinearity of 18.4 nm is reduced to a value of 140 pm.","PeriodicalId":433243,"journal":{"name":"2008 International Symposium on High Capacity Optical Networks and Enabling Technologies","volume":"154 ","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2008-11-01","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"3","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2008 International Symposium on High Capacity Optical Networks and Enabling Technologies","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/HONET.2008.4810220","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 3
Abstract
In this paper, a simple method to reduce the nonlinearity in the high-resolution nano-displacement measuring system using a modified laser interferometer is presented. By using a retarder plate and improved optical head, in additional to the nonlinearity compensation, the resolution of the displacement measurement is doubled and quadrupled compared to the conventional three- and two-mode laser interferometers, respectively. In the particular case, the nonlinearity of 18.4 nm is reduced to a value of 140 pm.
京公网安备 11010802042870号
京ICP备2023020795号-1
分享
求助内容：
应助结果提醒方式：
扫码关注我们
