S. Pinel, F. Cros, S. Nuttinck, S. Yoon, M. Allen, J. Laskar
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引用次数: 38
Abstract
We present the fabrication and the characterization of very high-Q suspended RF-MEMS inductors for RF applications in C-band, X-band and Ku-band. The fabrication technique relies on conventional MEMS micro-machining on a low cost ceramic RF substrate. This low temperature, low cost manufacturing technique is therefore compatible with the fabrication of a complete S-O-P wireless integrated module. A physical based model of the inductors is presented. It takes into account the influence of substrate losses and radiation losses. The fabricated devices exhibit very high performances such as Q above 100 and self-resonance frequency as high as 50 GHz.
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