E. Bormashenko, R. Pogreb, Y. Socol, M.H. Itzhaq, S. Sutovski, A. Sheshnev, Y. Bormashenko
{"title":"Direct writing of cylindrical microlenses on polymer substrates","authors":"E. Bormashenko, R. Pogreb, Y. Socol, M.H. Itzhaq, S. Sutovski, A. Sheshnev, Y. Bormashenko","doi":"10.1109/ICSENS.2003.1279049","DOIUrl":null,"url":null,"abstract":"The fabrication of cylindrical microlenses and microlens arrays by CO/sub 2/ laser irradiation of polyvinylidene fluoride substrates (PVDF) has been demonstrated. Cylindrical microlenses are extensively used for various optical sensing techniques. Microlenses obtained by the proposed process are transparent in the broad middle-IR band, so microlenses could be used for various IR optics applications. PVDF is distinguished by its strong piezoelectric properties. Thus applications of the microlenses in the integrated optic schemes are possible. An experimental technique allowing study of microlens cross-sections was developed. The focusing ability of the microlenses was studied. The optical quality of the microlenses in the visible region was examined by far-field diffraction study.","PeriodicalId":369277,"journal":{"name":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","volume":"80 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-10-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings of IEEE Sensors 2003 (IEEE Cat. No.03CH37498)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ICSENS.2003.1279049","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
The fabrication of cylindrical microlenses and microlens arrays by CO/sub 2/ laser irradiation of polyvinylidene fluoride substrates (PVDF) has been demonstrated. Cylindrical microlenses are extensively used for various optical sensing techniques. Microlenses obtained by the proposed process are transparent in the broad middle-IR band, so microlenses could be used for various IR optics applications. PVDF is distinguished by its strong piezoelectric properties. Thus applications of the microlenses in the integrated optic schemes are possible. An experimental technique allowing study of microlens cross-sections was developed. The focusing ability of the microlenses was studied. The optical quality of the microlenses in the visible region was examined by far-field diffraction study.
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