E. Kalvesten, T. Corman, M. Huiku, K. Weckstrom, P. Merilainen, G. Stemme
{"title":"A silicon IR-source and CO/sub 2/-chamber for CO/sub 2/ measurements","authors":"E. Kalvesten, T. Corman, M. Huiku, K. Weckstrom, P. Merilainen, G. Stemme","doi":"10.1109/MEMSYS.1998.659731","DOIUrl":null,"url":null,"abstract":"For the first time a silicon IR-source and CO/sub 2/-chamber system for measurement of CO/sub 2/ concentration is presented. This new miniaturized infrared sensor is specially designed for the measurement of respiratory gases present in patient airways during anaesthesia or intensive care. The IR-sensor assembly consists of an IR-source chip with two pairs of diagonally arranged IR-sources for the generation of two switched \"sample\" and reference beams. The gas filter chip is arranged with two CO/sub 2/ chambers directly beneath the two reference sources. These chambers \"pre-absorb\" the reference beam at the CO/sub 2/ wavelength band around 4.26 /spl mu/m. The reference beam is needed for long term stability and for compensation against cuvette window contamination. The electrically modulated IR-sources consist of incandescent polysilicon filaments coated with silicon nitride across a 220 /spl mu/m deep cavity. The CO/sub 2/-chambers with a length of 1 mm are fabricated by silicon fusion and anodic bonding at a chosen CO/sub 2/ pressure for optimal filter characteristics. Test measurements of the infrared sensor system show high CO/sub 2/-sensitivity meaning that the stringent requirements for this respirator application can be reached.","PeriodicalId":340972,"journal":{"name":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","volume":"8 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1998-01-25","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"2","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"Proceedings MEMS 98. IEEE. Eleventh Annual International Workshop on Micro Electro Mechanical Systems. An Investigation of Micro Structures, Sensors, Actuators, Machines and Systems (Cat. No.98CH36176","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/MEMSYS.1998.659731","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 2
Abstract
For the first time a silicon IR-source and CO/sub 2/-chamber system for measurement of CO/sub 2/ concentration is presented. This new miniaturized infrared sensor is specially designed for the measurement of respiratory gases present in patient airways during anaesthesia or intensive care. The IR-sensor assembly consists of an IR-source chip with two pairs of diagonally arranged IR-sources for the generation of two switched "sample" and reference beams. The gas filter chip is arranged with two CO/sub 2/ chambers directly beneath the two reference sources. These chambers "pre-absorb" the reference beam at the CO/sub 2/ wavelength band around 4.26 /spl mu/m. The reference beam is needed for long term stability and for compensation against cuvette window contamination. The electrically modulated IR-sources consist of incandescent polysilicon filaments coated with silicon nitride across a 220 /spl mu/m deep cavity. The CO/sub 2/-chambers with a length of 1 mm are fabricated by silicon fusion and anodic bonding at a chosen CO/sub 2/ pressure for optimal filter characteristics. Test measurements of the infrared sensor system show high CO/sub 2/-sensitivity meaning that the stringent requirements for this respirator application can be reached.
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