{"title":"Nanopower betavoltaic microbatteries","authors":"Hang Guo, A. Lal","doi":"10.1109/SENSOR.2003.1215247","DOIUrl":null,"url":null,"abstract":"This paper presents theoretical and experimental studies on betavoltaic microbatteries using low-level radiation from 1/spl sim/100 milliCurie /sup 63/Ni thin films. The model indicates that powers of hundred nanowatts are possible with 50-100 milliCurie radioisotope sources. Two types of betavoltaic microbatteries are developed and tested. One is the planar silicon pn-diode with electroplating of /sup 63/Ni thin film, and the other is the bulk micromachined pn-junction structure with the inverted pyramid array. The obtained power is on the scale of one-nanowatt with an open circuit voltage of 128 millivolts, and a short circuit current of 2.86 nA. The output power can be increased using greater activity and efficient collector designs.","PeriodicalId":196104,"journal":{"name":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","volume":"12 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2003-06-08","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"78","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators and Microsystems. Digest of Technical Papers (Cat. No.03TH8664)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SENSOR.2003.1215247","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 78
Abstract
This paper presents theoretical and experimental studies on betavoltaic microbatteries using low-level radiation from 1/spl sim/100 milliCurie /sup 63/Ni thin films. The model indicates that powers of hundred nanowatts are possible with 50-100 milliCurie radioisotope sources. Two types of betavoltaic microbatteries are developed and tested. One is the planar silicon pn-diode with electroplating of /sup 63/Ni thin film, and the other is the bulk micromachined pn-junction structure with the inverted pyramid array. The obtained power is on the scale of one-nanowatt with an open circuit voltage of 128 millivolts, and a short circuit current of 2.86 nA. The output power can be increased using greater activity and efficient collector designs.
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