{"title":"Capacitance analysis of pseudo-MOSFET using Cole-Cole plots","authors":"Isao Yarita, Shingo Sato, Y. Omura","doi":"10.1109/IMFEDK.2016.7521669","DOIUrl":null,"url":null,"abstract":"This paper uses Cole-Cole plots to analyze the capacitance component of the pseudo-MOSFET as a function of frequency. Measurements of silicon-on-insulator wafers identify three capacitance components. Simulations using an equivalent circuit model of the pseudo MOSFET successfully match the measurement results over a wide range of frequency and can explain the probe-number dependence of impedance characteristic qualitatively.","PeriodicalId":293371,"journal":{"name":"2016 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK)","volume":"69 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2016-06-23","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2016 IEEE International Meeting for Future of Electron Devices, Kansai (IMFEDK)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/IMFEDK.2016.7521669","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 0
Abstract
This paper uses Cole-Cole plots to analyze the capacitance component of the pseudo-MOSFET as a function of frequency. Measurements of silicon-on-insulator wafers identify three capacitance components. Simulations using an equivalent circuit model of the pseudo MOSFET successfully match the measurement results over a wide range of frequency and can explain the probe-number dependence of impedance characteristic qualitatively.
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