Milind S. Pandit, G. Sobreviela, Callisto Pili, P. Steinmann, Douglas Young, Chun Zhao, Colin Baker, A. Seshia
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引用次数: 0
Abstract
Optimization of the oscillator front-end for resonant sensors is critical to addressing key metrics such as noise floor and output stability. This paper reports a method to improve the noise floor of resonant MEMS accelerometers by avoiding aliasing of high-frequency seismic noise for long-period measurements. In particular, the optimization of a Phase Locked Loop (PLL) front-end is employed for continuous tracking of the output. A noise floor improvement of 13x is seen in comparison to the case with no anti-aliasing control. A custom PLL is designed to mitigate the impact of high-frequency noise enabling the realization of a resonant accelerometer sensor module with a noise floor of 10 ng/√Hz.
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