首页 > 最新文献

2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)最新文献

英文 中文
The Parametric Amplification in MEMS Gyroscopes Based on Triple Resonant Frequency Signal 基于三共振频率信号的MEMS陀螺仪参数放大
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430481
Kai Wu, Kuo Lu, Qingsong Li, Hao Zhang, Ming Zhuo, Xuezhong Wu, D. Xiao
The parametric resonances have been widely investigated in many mechanical resonators, and the drive frequencies for parametric amplification are generally twice the resonant frequencies in related studies. This paper presents the parametric amplification resulting from applying the parametric excitation signal of triple resonant frequency along with the drive signal of the fundamental frequency to a disk resonator gyroscope (DRG). Experimental results in the DRG demonstrate that the response amplitude of the gyroscope increases with the increment of the triple frequency voltage, and the effective quality factor has been improved by 4.9 times at the same time.
在许多机械谐振器中,参量共振已经得到了广泛的研究,而参量放大的驱动频率一般为谐振频率的两倍。本文介绍了将三共振频率的参数激励信号和基频驱动信号加到圆盘谐振陀螺仪上所产生的参数放大效应。在DRG中的实验结果表明,陀螺仪的响应幅值随着三频电压的增加而增加,同时有效品质因子提高了4.9倍。
{"title":"The Parametric Amplification in MEMS Gyroscopes Based on Triple Resonant Frequency Signal","authors":"Kai Wu, Kuo Lu, Qingsong Li, Hao Zhang, Ming Zhuo, Xuezhong Wu, D. Xiao","doi":"10.1109/INERTIAL51137.2021.9430481","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430481","url":null,"abstract":"The parametric resonances have been widely investigated in many mechanical resonators, and the drive frequencies for parametric amplification are generally twice the resonant frequencies in related studies. This paper presents the parametric amplification resulting from applying the parametric excitation signal of triple resonant frequency along with the drive signal of the fundamental frequency to a disk resonator gyroscope (DRG). Experimental results in the DRG demonstrate that the response amplitude of the gyroscope increases with the increment of the triple frequency voltage, and the effective quality factor has been improved by 4.9 times at the same time.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"64 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"124377736","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Polaris - A Low Cost MEMS Fabrication Platform for Navigation-Grade Inertial Sensors 北极星-导航级惯性传感器的低成本MEMS制造平台
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430465
D. Lin, Robert MacDonald, Dorin Calbaza, J. Popp, Tammy Johnson, E. Andarawis, M. Aimi
GE Research has developed a low-cost inertial MEMS process flow for navigation-grade inertial sensor fabrication called the ‘Polaris' process. With a total of six mask layers, GE Polaris features thick silicon on insulation (SOI) with a 20 to 200 µm device layer, 30:1 high aspect ratio etching, and wafer level vacuum sealing with through silicon via (TSV) technology. GE Polaris has demonstrated good TSV ohmic contact, good vacuum seal integrity, high wafer yield with good etch symmetry and uniformity, and proven navigation-grade performance with high temperature reliability. GE Polaris strives to provide the simplest MEMS PNT flow for quick prototyping and low-to-mid volume production.
GE研发公司开发了一种低成本的惯性MEMS工艺流程,用于制造导航级惯性传感器,称为“北极星”工艺。GE Polaris共六个掩模层,具有20至200 μ m器件层的厚绝缘硅(SOI), 30:1的高纵横比蚀刻和晶圆级真空密封,采用透硅通孔(TSV)技术。GE Polaris具有良好的TSV欧姆接触,良好的真空密封完整性,高晶圆成品率,良好的蚀刻对称性和均匀性,以及经过验证的导航级性能和高温可靠性。GE Polaris致力于为快速原型和中小批量生产提供最简单的MEMS PNT流程。
{"title":"Polaris - A Low Cost MEMS Fabrication Platform for Navigation-Grade Inertial Sensors","authors":"D. Lin, Robert MacDonald, Dorin Calbaza, J. Popp, Tammy Johnson, E. Andarawis, M. Aimi","doi":"10.1109/INERTIAL51137.2021.9430465","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430465","url":null,"abstract":"GE Research has developed a low-cost inertial MEMS process flow for navigation-grade inertial sensor fabrication called the ‘Polaris' process. With a total of six mask layers, GE Polaris features thick silicon on insulation (SOI) with a 20 to 200 µm device layer, 30:1 high aspect ratio etching, and wafer level vacuum sealing with through silicon via (TSV) technology. GE Polaris has demonstrated good TSV ohmic contact, good vacuum seal integrity, high wafer yield with good etch symmetry and uniformity, and proven navigation-grade performance with high temperature reliability. GE Polaris strives to provide the simplest MEMS PNT flow for quick prototyping and low-to-mid volume production.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"13 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"125692191","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
SWaP Reduction for High Dynamic Navigation Grade Accelerometer Based on Quartz VBA Technology 基于石英VBA技术的高动态导航级加速度计SWaP减小
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430477
Rachid Taïbi, Olivier Jolly, T. Kerrien, Pascal Labarthe, Karl Aubry, Gauthier Le Bihan, Stéphanie Michel
This paper reports a new Quartz vibrating sensor developed by iXblue to respond to new challenges for navigation applications as high dynamic range (100g), navigation grade performance (< 100μg and 30 ppm bias and scale factor respectively) according with the challenge of Size, Weight and Power (SWaP) consumption reduction (less than 10 grams and 50mW).
本文报道了iXblue开发的一种新型石英振动传感器,以应对导航应用的新挑战,如高动态范围(100g),导航级性能(分别< 100μg和30 ppm偏差和比例因子),以及尺寸,重量和功耗(SWaP)降低(小于10克和50mW)的挑战。
{"title":"SWaP Reduction for High Dynamic Navigation Grade Accelerometer Based on Quartz VBA Technology","authors":"Rachid Taïbi, Olivier Jolly, T. Kerrien, Pascal Labarthe, Karl Aubry, Gauthier Le Bihan, Stéphanie Michel","doi":"10.1109/INERTIAL51137.2021.9430477","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430477","url":null,"abstract":"This paper reports a new Quartz vibrating sensor developed by iXblue to respond to new challenges for navigation applications as high dynamic range (100g), navigation grade performance (< 100μg and 30 ppm bias and scale factor respectively) according with the challenge of Size, Weight and Power (SWaP) consumption reduction (less than 10 grams and 50mW).","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123599036","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
A High-Performance Rate-Integrating Hemispherical Resonant Gyros with 0.00753°/h Bias Instability 一种具有0.00753°/h偏置不稳定性的高性能积分速率半球谐振陀螺仪
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430490
Yongmeng Zhang, Sheng Yu, Kechen Guo, Jiangkun Sun, Xuezhong Wu, D. Xiao
This paper reports a high performance rate-integrating Hemispherical Resonant Gyroscope (HRG). After the compensation on the anisostiffness, anisodamping and detection and actuation gain errors, the frequency mismatch and angle-dependent bias drift (ADB) of HRG reduce about 85% from 2mHz to 0.3mHz and 78% from 0.01°/s to 0.0022°/s, respectively. Finally, HRG shows excellent bias instability of 0.00753°/h, high input range of over ±2600°/s with small nonlinearity of 17ppm and a threshold value of less than ±0.001°/s.
本文报道了一种高性能速率积分半球面谐振陀螺仪(HRG)。在对各向异性刚度、各向异性阻尼以及检测增益和驱动增益误差进行补偿后,HRG的频率失配和角相关偏置漂移(ADB)分别在2mHz ~ 0.3mHz和0.01°/s ~ 0.0022°/s范围内降低了约85%和78%。最后,HRG具有0.00753°/h的优异偏置不稳定性,高输入范围超过±2600°/s,非线性较小,阈值小于±0.001°/s。
{"title":"A High-Performance Rate-Integrating Hemispherical Resonant Gyros with 0.00753°/h Bias Instability","authors":"Yongmeng Zhang, Sheng Yu, Kechen Guo, Jiangkun Sun, Xuezhong Wu, D. Xiao","doi":"10.1109/INERTIAL51137.2021.9430490","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430490","url":null,"abstract":"This paper reports a high performance rate-integrating Hemispherical Resonant Gyroscope (HRG). After the compensation on the anisostiffness, anisodamping and detection and actuation gain errors, the frequency mismatch and angle-dependent bias drift (ADB) of HRG reduce about 85% from 2mHz to 0.3mHz and 78% from 0.01°/s to 0.0022°/s, respectively. Finally, HRG shows excellent bias instability of 0.00753°/h, high input range of over ±2600°/s with small nonlinearity of 17ppm and a threshold value of less than ±0.001°/s.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"54 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"129453855","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Microfabricated Optically Pumped Gradiometer with Uniform Buffer Gases 具有均匀缓冲气体的微制造光泵梯度计
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430474
Austin R. Parrish, R. Noor, A. Shkel
This paper reports on the development of a microfabricated gradiometer that permits uniform buffer gas content in both magnetometers. This improves the common mode noise rejection of the gradiometer by ensuring the broadening and shift of the Rb optical absorption line are uniform. The reported fabrication process permits micro-channels connecting the two magnetometers allowing for uniform buffer gas pressure. We discuss two methods of characterizing the common mode rejection ratio (CMRR), before and after measuring the frequency response of the individual magnetometers. The average uncalibrated and calibrated CMRR achieved in a table-top setup was 72.7 and 85.0 respectively over a bandwidth 3-200Hz.
本文报道了一种微加工梯度计的发展,该梯度计允许在两个磁强计中均匀的缓冲气体含量。通过保证Rb光吸收线的加宽和位移均匀,提高了梯度仪的共模噪声抑制能力。所报道的制造工艺允许微通道连接两个磁强计,允许均匀的缓冲气体压力。讨论了测量单个磁强计频率响应前后共模抑制比(CMRR)的两种表征方法。在3-200Hz带宽范围内,在桌面设置中获得的平均未校准和校准CMRR分别为72.7和85.0。
{"title":"Microfabricated Optically Pumped Gradiometer with Uniform Buffer Gases","authors":"Austin R. Parrish, R. Noor, A. Shkel","doi":"10.1109/INERTIAL51137.2021.9430474","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430474","url":null,"abstract":"This paper reports on the development of a microfabricated gradiometer that permits uniform buffer gas content in both magnetometers. This improves the common mode noise rejection of the gradiometer by ensuring the broadening and shift of the Rb optical absorption line are uniform. The reported fabrication process permits micro-channels connecting the two magnetometers allowing for uniform buffer gas pressure. We discuss two methods of characterizing the common mode rejection ratio (CMRR), before and after measuring the frequency response of the individual magnetometers. The average uncalibrated and calibrated CMRR achieved in a table-top setup was 72.7 and 85.0 respectively over a bandwidth 3-200Hz.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"43 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"127134198","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 0
Mode-Matched Multi-Ring Disk Resonator Using Single Crystal (100) Silicon 使用单晶(100)硅的模式匹配多环盘谐振器
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430467
Jianlin Chen, T. Tsukamoto, Shuji Tanaka
In this paper, we report two types of novel mode-matched disk resonators consisting of multi rings made by single crystal (100) silicon. One of the resonators compensates the frequency mismatch using a combination of thick ring and multiple thin rings, showing the mode mismatch as small as 43 ppm. The other one uses elliptic shape connection structures, showing the mode-mismatch as small as 61 ppm. Considering the robustness of mode matching against fabrication errors, the crystal orientation error increases the frequency mismatch more significantly in the first design, and the ring width variation causes larger frequency split in the later design.
本文报道了两种由单晶(100)硅制成的由多环组成的新型模式匹配圆盘谐振器。其中一个谐振器使用厚环和多个薄环的组合来补偿频率不匹配,显示模式不匹配小到43 ppm。另一种采用椭圆形状的连接结构,显示模式不匹配小到61 ppm。考虑到模式匹配对制造误差的鲁棒性,晶体取向误差在第一次设计中更明显地增加了频率失配,而环宽度的变化在后来的设计中导致了更大的频率分裂。
{"title":"Mode-Matched Multi-Ring Disk Resonator Using Single Crystal (100) Silicon","authors":"Jianlin Chen, T. Tsukamoto, Shuji Tanaka","doi":"10.1109/INERTIAL51137.2021.9430467","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430467","url":null,"abstract":"In this paper, we report two types of novel mode-matched disk resonators consisting of multi rings made by single crystal (100) silicon. One of the resonators compensates the frequency mismatch using a combination of thick ring and multiple thin rings, showing the mode mismatch as small as 43 ppm. The other one uses elliptic shape connection structures, showing the mode-mismatch as small as 61 ppm. Considering the robustness of mode matching against fabrication errors, the crystal orientation error increases the frequency mismatch more significantly in the first design, and the ring width variation causes larger frequency split in the later design.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"149 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"116052227","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 3
Simulation Design of Thermopile and Magnetometer Aided INS/GPS Navigation System for UAV Navigation 无人机导航热电堆和磁强计辅助INS/GPS导航系统仿真设计
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430487
Atsumi Toda, Y. Koike
This paper proposes a thermopile and magnetometer-assisted INS/GPS navigation as a robust navigation method for attitude estimation compared to the conventional loosely-coupled INS/GPS method. This system aims to maintain the accuracy of attitude estimation even when autonomous UAV loses GPS signals temporarily, and to continue the flight without crashing. Accuracy of the attitude estimation is maintained by directly correcting the attitude estimates (roll, pitch, and heading) from INS by using the infrared intensity and magnetic-based sensor models. We performed the simulation to compare the accuracy of the proposed method and loosely-coupled INS/GPS. Results showed that when the GPS signal is active, the estimation accuracy of the two methods for attitude, velocity, and position are identical. Moreover, when the GPS signal is lost, all the estimates deteriorate in the conventional method, while our system maintains the accuracy of the attitude estimation and suppresses the decrease in the accuracy of the velocity and position estimates.
本文提出了一种热电堆和磁力计辅助的INS/GPS导航方法,作为一种鲁棒的姿态估计导航方法,与传统的松耦合INS/GPS方法相比。该系统的目的是在自主无人机暂时失去GPS信号的情况下,保持姿态估计的准确性,并在不坠毁的情况下继续飞行。通过使用红外强度和基于磁的传感器模型直接修正来自INS的姿态估计(横摇、俯仰和航向),保持姿态估计的准确性。通过仿真比较了该方法与松耦合INS/GPS的精度。结果表明,当GPS信号有活动时,两种方法对姿态、速度和位置的估计精度相同。此外,当GPS信号丢失时,传统方法的估计结果都变差,而我们的系统保持了姿态估计的精度,抑制了速度和位置估计精度的下降。
{"title":"Simulation Design of Thermopile and Magnetometer Aided INS/GPS Navigation System for UAV Navigation","authors":"Atsumi Toda, Y. Koike","doi":"10.1109/INERTIAL51137.2021.9430487","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430487","url":null,"abstract":"This paper proposes a thermopile and magnetometer-assisted INS/GPS navigation as a robust navigation method for attitude estimation compared to the conventional loosely-coupled INS/GPS method. This system aims to maintain the accuracy of attitude estimation even when autonomous UAV loses GPS signals temporarily, and to continue the flight without crashing. Accuracy of the attitude estimation is maintained by directly correcting the attitude estimates (roll, pitch, and heading) from INS by using the infrared intensity and magnetic-based sensor models. We performed the simulation to compare the accuracy of the proposed method and loosely-coupled INS/GPS. Results showed that when the GPS signal is active, the estimation accuracy of the two methods for attitude, velocity, and position are identical. Moreover, when the GPS signal is lost, all the estimates deteriorate in the conventional method, while our system maintains the accuracy of the attitude estimation and suppresses the decrease in the accuracy of the velocity and position estimates.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"119 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123583514","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
Digital Control of MEMS Gyroscopes: A Robust Approach 微机电系统陀螺仪的数字控制:一种鲁棒方法
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430470
Fabrício Saggin, Cécile Pernin, A. Korniienko, G. Scorletti, C. Blanc
This work presents a new approach to design the controllers for MEMS gyroscopes based on the robust $H$∞ synthesis. A systematic and flexible method for designing digital controllers for the drive and sense modes of a Coriolis vibratory gyroscope is proposed. Furthermore, the sinusoidal signals are directly controlled instead of their amplitude and phase, so that (de)modulation is not required in the control loops. This fact allows us to simplify the electronic design and to provide formal guarantees of stability and performance. First practical results are presented, proving the implementability of our approach.
本文提出了一种基于鲁棒$H$∞综合的MEMS陀螺仪控制器设计新方法。提出了一种系统、灵活的科氏振动陀螺仪驱动模式和传感模式数字控制器设计方法。此外,正弦信号是直接控制的,而不是它们的幅度和相位,因此在控制回路中不需要(去)调制。这一事实使我们能够简化电子设计,并提供稳定性和性能的正式保证。首先给出了实际结果,证明了该方法的可实现性。
{"title":"Digital Control of MEMS Gyroscopes: A Robust Approach","authors":"Fabrício Saggin, Cécile Pernin, A. Korniienko, G. Scorletti, C. Blanc","doi":"10.1109/INERTIAL51137.2021.9430470","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430470","url":null,"abstract":"This work presents a new approach to design the controllers for MEMS gyroscopes based on the robust $H$∞ synthesis. A systematic and flexible method for designing digital controllers for the drive and sense modes of a Coriolis vibratory gyroscope is proposed. Furthermore, the sinusoidal signals are directly controlled instead of their amplitude and phase, so that (de)modulation is not required in the control loops. This fact allows us to simplify the electronic design and to provide formal guarantees of stability and performance. First practical results are presented, proving the implementability of our approach.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"38 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"123530301","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 2
Development of a Navigation-Grade MEMS IMU 导航级MEMS IMU的研制
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430466
Burgess R. Johnson, Curt Albrecht, T. Braman, K. Christ, Patrick Duffy, D. Endean, M. Gnerlich, J. Reinke
Performance data is presented from a MEMS-based IMU being developed at Honeywell with the objective of navigation-grade performance for a variety of applications. Design of the gyroscope is derived from that of the gyroscope in Honeywell's HG1930 tactical-grade MEMS IMU, a widely used tactical-grade MEMS IMU product. Fabrication processes similar to that of the gyroscope are used to fabricate a new vibrating beam accelerometer which measures acceleration via differential frequency change. Turn-on to turn-on bias repeatability better than 0.1 deg/hr for the gyroscopes and better than 20 micro-g for the accelerometers has been consistently demonstrated. Typical gyro ARW of 0.0035 deg/rt(hr) has been achieved, and accel root Allan variance is less than 10 micro-g at integration time of 1 second. The IMU has the same mechanical footprint (though slightly taller) and same electrical interface as Honeywell's HG1930 IMU.
性能数据来自霍尼韦尔正在开发的基于mems的IMU,其目标是为各种应用提供导航级性能。陀螺仪的设计来源于霍尼韦尔HG1930战术级MEMS IMU中陀螺仪的设计,HG1930战术级MEMS IMU是一种广泛使用的战术级MEMS IMU产品。采用与陀螺仪类似的制造工艺,制造了一种通过差频变化测量加速度的新型振动梁加速度计。打开到打开偏置的可重复性优于0.1度/小时的陀螺仪和优于20微克/小时的加速度计已被一致证明。典型的陀螺ARW为0.0035°/rt(hr),加速度根艾伦方差小于10微克,积分时间为1秒。该IMU与霍尼韦尔的HG1930 IMU具有相同的机械足迹(尽管稍高)和相同的电气接口。
{"title":"Development of a Navigation-Grade MEMS IMU","authors":"Burgess R. Johnson, Curt Albrecht, T. Braman, K. Christ, Patrick Duffy, D. Endean, M. Gnerlich, J. Reinke","doi":"10.1109/INERTIAL51137.2021.9430466","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430466","url":null,"abstract":"Performance data is presented from a MEMS-based IMU being developed at Honeywell with the objective of navigation-grade performance for a variety of applications. Design of the gyroscope is derived from that of the gyroscope in Honeywell's HG1930 tactical-grade MEMS IMU, a widely used tactical-grade MEMS IMU product. Fabrication processes similar to that of the gyroscope are used to fabricate a new vibrating beam accelerometer which measures acceleration via differential frequency change. Turn-on to turn-on bias repeatability better than 0.1 deg/hr for the gyroscopes and better than 20 micro-g for the accelerometers has been consistently demonstrated. Typical gyro ARW of 0.0035 deg/rt(hr) has been achieved, and accel root Allan variance is less than 10 micro-g at integration time of 1 second. The IMU has the same mechanical footprint (though slightly taller) and same electrical interface as Honeywell's HG1930 IMU.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"92 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"122700015","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 18
Method for the Synchronization of Data Recorders by Coupling Accelerometer Data 耦合加速度计数据同步记录仪的方法
Pub Date : 2021-03-22 DOI: 10.1109/INERTIAL51137.2021.9430459
Jose Ricardo Silva Scarpari, C. S. Deolindo, Maria Adelia Albano Aratanha, M. W. Ribeiro, Anderson de Souza, E. Kozasa, Daisy Hirata, J. E. Matieli, R. G. Annes da Silva, C. Forster
This paper presents a method to synchronize data acquisition devices that are mechanically coupled, having attached an accelerometer to each device. A common time base for the accelerometer signals are obtained through the identification of pairing salient peaks and applying line-fitting through the potential matches. Aligning data recorded from different sources is important to precisely provide an observation of the state of a system in time (sensor fusion), to estimate the correlation between its variables and to correlate variables to time-based events. A data link between devices is not always possible or convenient. If the acquisition devices are mechanically coupled, such as being in the same body or vehicle, we propose to synchronize the data recorded from both by using the accelerometers signals to bridge. The provided solution is an automated process to find the temporal reference between accelerometer signals. Several signal processing steps are taken after data collection and storage: inconsistency removal and filtering, detection of maxima and minima, selection of saliencies, description through a characteristic pair of numbers: the interval lengths between it and its successor and its predecessor, listing possible matches between salient points, selection of the topmost relevant matches and line fitting with consensus. We discuss qualitative similarities of related work. Quantitative results are also presented by using the multidisciplinary study that motivated this work, with simultaneous data from the instrumentation of a helicopter and pilot physiological data. To conclude, we discuss the limitations of the presented approach and future work.
本文提出了一种同步数据采集设备的方法,这些设备是机械耦合的,在每个设备上附加一个加速度计。通过识别配对显著峰,并通过潜在匹配进行线拟合,得到加速度计信号的共同时间基。调整来自不同来源的记录数据对于准确地提供对系统状态的实时观察(传感器融合),估计其变量之间的相关性以及将变量与基于时间的事件关联起来非常重要。设备之间的数据链接并不总是可行或方便的。如果采集设备是机械耦合的,例如在同一身体或车辆中,我们建议通过使用加速度计信号进行桥接来同步从两者记录的数据。提供的解决方案是一个自动化的过程,以找到加速度计信号之间的时间参考。在数据收集和存储之后,采取了几个信号处理步骤:不一致的去除和过滤,最大值和最小值的检测,显著性的选择,通过特征数对的描述:它与其后继点和前代点之间的间隔长度,列出显著点之间可能的匹配,选择最相关的匹配和一致性的线拟合。我们讨论了相关工作的质的相似性。定量结果也通过使用多学科研究提出,该研究激励了这项工作,同时数据来自直升机仪器和飞行员的生理数据。最后,我们讨论了所提出方法的局限性和未来的工作。
{"title":"Method for the Synchronization of Data Recorders by Coupling Accelerometer Data","authors":"Jose Ricardo Silva Scarpari, C. S. Deolindo, Maria Adelia Albano Aratanha, M. W. Ribeiro, Anderson de Souza, E. Kozasa, Daisy Hirata, J. E. Matieli, R. G. Annes da Silva, C. Forster","doi":"10.1109/INERTIAL51137.2021.9430459","DOIUrl":"https://doi.org/10.1109/INERTIAL51137.2021.9430459","url":null,"abstract":"This paper presents a method to synchronize data acquisition devices that are mechanically coupled, having attached an accelerometer to each device. A common time base for the accelerometer signals are obtained through the identification of pairing salient peaks and applying line-fitting through the potential matches. Aligning data recorded from different sources is important to precisely provide an observation of the state of a system in time (sensor fusion), to estimate the correlation between its variables and to correlate variables to time-based events. A data link between devices is not always possible or convenient. If the acquisition devices are mechanically coupled, such as being in the same body or vehicle, we propose to synchronize the data recorded from both by using the accelerometers signals to bridge. The provided solution is an automated process to find the temporal reference between accelerometer signals. Several signal processing steps are taken after data collection and storage: inconsistency removal and filtering, detection of maxima and minima, selection of saliencies, description through a characteristic pair of numbers: the interval lengths between it and its successor and its predecessor, listing possible matches between salient points, selection of the topmost relevant matches and line fitting with consensus. We discuss qualitative similarities of related work. Quantitative results are also presented by using the multidisciplinary study that motivated this work, with simultaneous data from the instrumentation of a helicopter and pilot physiological data. To conclude, we discuss the limitations of the presented approach and future work.","PeriodicalId":424028,"journal":{"name":"2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)","volume":"253 1","pages":"0"},"PeriodicalIF":0.0,"publicationDate":"2021-03-22","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":null,"resultStr":null,"platform":"Semanticscholar","paperid":"134385359","PeriodicalName":null,"FirstCategoryId":null,"ListUrlMain":null,"RegionNum":0,"RegionCategory":"","ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":"","EPubDate":null,"PubModel":null,"JCR":null,"JCRName":null,"Score":null,"Total":0}
引用次数: 1
期刊
2021 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL)
全部 Acc. Chem. Res. ACS Applied Bio Materials ACS Appl. Electron. Mater. ACS Appl. Energy Mater. ACS Appl. Mater. Interfaces ACS Appl. Nano Mater. ACS Appl. Polym. Mater. ACS BIOMATER-SCI ENG ACS Catal. ACS Cent. Sci. ACS Chem. Biol. ACS Chemical Health & Safety ACS Chem. Neurosci. ACS Comb. Sci. ACS Earth Space Chem. ACS Energy Lett. ACS Infect. Dis. ACS Macro Lett. ACS Mater. Lett. ACS Med. Chem. Lett. ACS Nano ACS Omega ACS Photonics ACS Sens. ACS Sustainable Chem. Eng. ACS Synth. Biol. Anal. Chem. BIOCHEMISTRY-US Bioconjugate Chem. BIOMACROMOLECULES Chem. Res. Toxicol. Chem. Rev. Chem. Mater. CRYST GROWTH DES ENERG FUEL Environ. Sci. Technol. Environ. Sci. Technol. Lett. Eur. J. Inorg. Chem. IND ENG CHEM RES Inorg. Chem. J. Agric. Food. Chem. J. Chem. Eng. Data J. Chem. Educ. J. Chem. Inf. Model. J. Chem. Theory Comput. J. Med. Chem. J. Nat. Prod. J PROTEOME RES J. Am. Chem. Soc. LANGMUIR MACROMOLECULES Mol. Pharmaceutics Nano Lett. Org. Lett. ORG PROCESS RES DEV ORGANOMETALLICS J. Org. Chem. J. Phys. Chem. J. Phys. Chem. A J. Phys. Chem. B J. Phys. Chem. C J. Phys. Chem. Lett. Analyst Anal. Methods Biomater. Sci. Catal. Sci. Technol. Chem. Commun. Chem. Soc. Rev. CHEM EDUC RES PRACT CRYSTENGCOMM Dalton Trans. Energy Environ. Sci. ENVIRON SCI-NANO ENVIRON SCI-PROC IMP ENVIRON SCI-WAT RES Faraday Discuss. Food Funct. Green Chem. Inorg. Chem. Front. Integr. Biol. J. Anal. At. Spectrom. J. Mater. Chem. A J. Mater. Chem. B J. Mater. Chem. C Lab Chip Mater. Chem. Front. Mater. Horiz. MEDCHEMCOMM Metallomics Mol. Biosyst. Mol. Syst. Des. Eng. Nanoscale Nanoscale Horiz. Nat. Prod. Rep. New J. Chem. Org. Biomol. Chem. Org. Chem. Front. PHOTOCH PHOTOBIO SCI PCCP Polym. Chem.
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1