{"title":"Robust Topology Optimization for Foundry-Photonics Inverse Design: Examining Compact and Arbitrary Power Splitters","authors":"A. Hammond, J. Slaby, Gareeyasee Saha, S. Ralph","doi":"10.1109/ecoc52684.2021.9606156","DOIUrl":null,"url":null,"abstract":"We present a novel framework for robust inverse-design of semiconductor-foundry devices tolerant to standard fabrication variability. We designed and tested compact 50/50, 90/10, and 99/1 power splitters sampled across multiple wafers on a commercial silicon photonic process, demonstrating < ±2% deviation over 100 nm of bandwidth.","PeriodicalId":117375,"journal":{"name":"2021 European Conference on Optical Communication (ECOC)","volume":"22 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2021-09-13","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2021 European Conference on Optical Communication (ECOC)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/ecoc52684.2021.9606156","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
We present a novel framework for robust inverse-design of semiconductor-foundry devices tolerant to standard fabrication variability. We designed and tested compact 50/50, 90/10, and 99/1 power splitters sampled across multiple wafers on a commercial silicon photonic process, demonstrating < ±2% deviation over 100 nm of bandwidth.
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