Compact planar optical devices (CPODs) by CVD technology

V. Bhagavatula, B. Boller, R.J. Hagerty, P. A. Sachenik
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Abstract

In this report, a number of novel, compact planar optical device (CPOD) concepts are described. The application of these novel structures for the fabrication of planar devices, such as 1/spl times/N couplers, is described. The requirements of these devices for various applications are given. The advantages of this approach for device fabrication and packaging are given. Performance results of a number of these devices made by a CVD planar process are presented.<>
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基于CVD技术的紧凑平面光学器件(CPODs)
在本报告中,描述了一些新颖的,紧凑的平面光学器件(CPOD)概念。描述了这些新型结构在1/ sp1倍/N耦合器等平面器件制造中的应用。给出了这些器件在各种应用场合的要求。给出了这种方法在器件制造和封装方面的优点。介绍了用CVD平面工艺制备的若干器件的性能结果。
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Development of a tapeless lead-on-chip (LOC) package A photosensitive-BCB on laminate technology (MCM-LD) A PC program that generates a model of the parasitics for IC packages Compact planar optical devices (CPODs) by CVD technology Predicting solder joint shape by computer modeling
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