Observation of Ultrasonic Al-Si Wire Wedge Bond Interface Using High Resolution Transmission Electron Microscope

H. Ji, Mingyu Li, Y. Kweon, W. Chang, Chunqing Wang
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引用次数: 4

Abstract

Due to small bond size, short bonding time, especially slight interface reaction, bonding details cannot be recognized using scanning electron microscope and energy density X-ray spectrum. In order to understand the physical mechanism of ultrasonic wedge bonding, in this paper, bond interface of ultrasonic AlSi wire wedge bonding on Au/Ni/Cu pad was investigated under high resolution transmission electron microscope. Au8Al3 intermetallic compounds were identified by convergent beam electron diffraction, thickness of which was about 200 nm and its lattice images were captured. Solid-state diffusion theory cannot be used to explain why such thick compound formed within milliseconds at room temperature. Ultrasonic effects attributed to formation of the metallurgical bonds.
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超声铝硅丝楔键界面的高分辨透射电镜观察
由于成键尺寸小,成键时间短,特别是界面反应轻微,用扫描电镜和能量密度x射线能谱无法识别成键细节。为了了解超声楔键合的物理机制,本文在高分辨透射电镜下研究了超声AlSi丝楔键合在Au/Ni/Cu衬垫上的键合界面。利用会聚束电子衍射技术鉴定了厚度约为200 nm的Au8Al3金属间化合物,并获得了其晶格图像。固态扩散理论无法解释为什么如此厚的化合物在室温下几毫秒内就形成了。超声效应归因于冶金键的形成。
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