{"title":"New Trench Depth Measurement System with Wavelength-Rapidly-Scanning Acousto-Optic Tunable Filter for VLSI DRAMs Capacitor Cells","authors":"K. Takada, J. Noda, S. Nakajima","doi":"10.1109/CPEM.1988.671295","DOIUrl":null,"url":null,"abstract":"","PeriodicalId":326579,"journal":{"name":"1988 Conference on Precision Electromagnetic Measurements","volume":"35 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"1988-06-07","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"1988 Conference on Precision Electromagnetic Measurements","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/CPEM.1988.671295","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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