Laser induced writing of conductive copper lines for electronic devices

W. Wang, M. Seufert, A. Lenhart, W. Jillek
{"title":"Laser induced writing of conductive copper lines for electronic devices","authors":"W. Wang, M. Seufert, A. Lenhart, W. Jillek","doi":"10.1109/AGEC.2004.1290896","DOIUrl":null,"url":null,"abstract":"The direct writing of conductive copper lines on alumina substrates by means of a Nd/YAG-laser was investigated as an alternative to established thick-film and thin-film hybrid technology. Copper powder in the low micrometer range was sprayed as an aqueous dispersion on the surface of alumina substrates normally used for thick-film hybrids. With proper setting of the laser parameters, conductor lines with good adhesion and a relatively smooth surface were achieved. After removal of the excessive copper powder, the remaining copper particles acted as seeds for a subsequent electroless copper plating thus providing an electrical conductivity sufficient for electronic devices.","PeriodicalId":291057,"journal":{"name":"2004 International IEEE Conference on the Asian Green Electronics (AGEC). Proceedings of","volume":"13 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2004-09-27","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2004 International IEEE Conference on the Asian Green Electronics (AGEC). Proceedings of","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/AGEC.2004.1290896","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1

Abstract

The direct writing of conductive copper lines on alumina substrates by means of a Nd/YAG-laser was investigated as an alternative to established thick-film and thin-film hybrid technology. Copper powder in the low micrometer range was sprayed as an aqueous dispersion on the surface of alumina substrates normally used for thick-film hybrids. With proper setting of the laser parameters, conductor lines with good adhesion and a relatively smooth surface were achieved. After removal of the excessive copper powder, the remaining copper particles acted as seeds for a subsequent electroless copper plating thus providing an electrical conductivity sufficient for electronic devices.
查看原文
分享 分享
微信好友 朋友圈 QQ好友 复制链接
本刊更多论文
电子器件用导电铜线的激光诱导写入
研究了利用Nd/ yag激光在氧化铝基板上直接刻写导电铜线的方法,作为现有的厚膜和薄膜混合技术的替代方案。在低微米范围内的铜粉作为水分散体喷洒在通常用于厚膜杂化的氧化铝衬底表面。通过适当设置激光参数,可以获得附着力好、表面相对光滑的导体线。除去过量的铜粉后,剩余的铜颗粒充当随后化学镀铜的种子,从而为电子设备提供足够的导电性。
本文章由计算机程序翻译,如有差异,请以英文原文为准。
求助全文
约1分钟内获得全文 去求助
来源期刊
自引率
0.00%
发文量
0
期刊最新文献
Laser induced writing of conductive copper lines for electronic devices Scalable distributed architecture of the terabit router Reliability of ACF joint using bumpless chip after reflow process Environment-friendly PVD Al-plug process for submicron multilayer interconnection Environmental management in semiconductor and printed circuit board industry in India. Part I: Survey results and case studies
×
引用
GB/T 7714-2015
复制
MLA
复制
APA
复制
导出至
BibTeX EndNote RefMan NoteFirst NoteExpress
×
×
提示
您的信息不完整,为了账户安全,请先补充。
现在去补充
×
提示
您因"违规操作"
具体请查看互助需知
我知道了
×
提示
现在去查看 取消
×
提示
确定
0
微信
客服QQ
Book学术公众号 扫码关注我们
反馈
×
意见反馈
请填写您的意见或建议
请填写您的手机或邮箱
已复制链接
已复制链接
快去分享给好友吧!
我知道了
×
扫码分享
扫码分享
Book学术官方微信
Book学术文献互助
Book学术文献互助群
群 号:481959085
Book学术
文献互助 智能选刊 最新文献 互助须知 联系我们:info@booksci.cn
Book学术提供免费学术资源搜索服务,方便国内外学者检索中英文文献。致力于提供最便捷和优质的服务体验。
Copyright © 2023 Book学术 All rights reserved.
ghs 京公网安备 11010802042870号 京ICP备2023020795号-1