Scanning ultra fast distance sensor based on acousto-optic deflection

D. Semenov, E. Nippolainen, A. Kamshilin
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引用次数: 1

Abstract

We present distance measurement technique to any rough surface based on spatial filtering of a speckle pattern generated when the object surface is scanned by a laser beam deflected from an acousto-optic device. Scanning velocity of 150 m/s allows to complete single measurement within as short time as 50 ns. However stochastic nature of the speckle effect caused rather high inaccuracy. The data averaging is easily implemented within a single scan and allows us to achieve the accuracy of 110 mum within the time window of 2.5 mus. We analysed the factors affecting the performance of the proposed technique and showed that the response time can be diminished by an order of value using an acousto-optic crystal with higher acoustic speed. The proposed technique may be useful for monitoring of the geometrical parameters of fast moving or rotating surfaces in various industrial applications.
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基于声光偏转的扫描超快距离传感器
我们提出了一种基于空间滤波的粗糙表面的距离测量技术,该技术是由声光设备偏转的激光束扫描物体表面时产生的散斑模式。150米/秒的扫描速度可以在短至50纳秒的时间内完成单次测量。然而,散斑效应的随机性导致了相当高的不准确性。数据平均很容易在单次扫描中实现,并允许我们在2.5 μ m的时间窗口内实现110 μ m的精度。我们分析了影响所提出的技术性能的因素,并表明使用具有更高声速的声光晶体可以将响应时间减少一个数量级。所提出的技术可用于在各种工业应用中监测快速移动或旋转表面的几何参数。
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