Effect of process control in oxide-confined top-emitting lasers

M.Y. Li, W. Yuen, G.S. Li, C. Chang-Hasnain
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引用次数: 1

Abstract

Summary form only given. Transverse mode as a function of aperture size is studied. Stringent oxidation accuracy to within a fraction of 1 /spl mu/m is required to render high yield, single mode, oxide confined GaAs QW VCSELs.
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过程控制对氧化约束顶发射激光器的影响
只提供摘要形式。研究了横向模态与孔径大小的关系。严格的氧化精度要求在1 /spl mu/m的一小部分内,以提供高产量,单模,氧化受限的GaAs QW VCSELs。
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Technology and application trends of photonic integrated circuits Experimental analysis of room-temperature optical gain in GaInN-GaN and GaN-AlGaN double heterostructures and quantum wells Highly efficient selectively oxidized GaAs (/spl lambda/=830 nm) vertical-cavity lasers Effect of process control in oxide-confined top-emitting lasers Experimental analysis of characteristic temperature in quantum-well semiconductor lasers
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