Effect of Wire Bonding on The Performance of RFMEMS Filters

Abstract

In this work, an aluminum nitride (AlN) based radiofrequency microelectromechanical system (RFMEMS) filter operating at 2.4GHz is characterized on a PCB through wirebonding connection, in order to study the effect of wirebonding on the performance of the filter, in particular the frequency response. Electrical characterization results show that the through proper impedance matching, the bonding wire has minimum effect on the passband and stopband response, e.g., bandwidth, insertion loss, and out-of-band rejection. However, the wirebonding introduces a spurious mode at around 2.37GHz. As a result, the roll-off of the lower edge of the passband gets disturbed. EM simulation will be done to better understand the response of the wirebonding and finally to eliminate the spurious mode.