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2018 IEEE 20th Electronics Packaging Technology Conference (EPTC)最新文献

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Thermal simulation and measurement of component in avionics 航空电子元件的热模拟与测量
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654343
Jung Kyun Kim, Su-Heon Jeong
This paper shows that thermal characterization of TO-66 and TO-220 package transistors in avionics module using the thermal transient measurement method and simulation. To determine the thermal resistance values of the junction-to-case (RthJC), the JEDEC JESD 51-14 transient dual interface measurement method is a well-known and industry-wide accepted technique. In this article we also show a thermal model calibration tasks using transient thermal measurement. A detailed package model calibrated will allow even more accurate thermal simulations and improve the reliability of components.
本文采用热瞬态测量方法和仿真方法对航空电子模块中TO-66和TO-220封装晶体管的热特性进行了研究。为了确定结壳(RthJC)的热阻值,JEDEC JESD 51-14瞬态双界面测量方法是一种众所周知且被行业广泛接受的技术。在本文中,我们还展示了使用瞬态热测量的热模型校准任务。经过校准的详细封装模型将允许更精确的热模拟并提高组件的可靠性。
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引用次数: 3
Effect of Wire Bonding on The Performance of RFMEMS Filters 金属键合对RFMEMS滤波器性能的影响
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654368
Nan Wang, Yao Zhu, T. Lim, Navab Singh, Y. Gu
In this work, an aluminum nitride (AlN) based radiofrequency microelectromechanical system (RFMEMS) filter operating at 2.4GHz is characterized on a PCB through wirebonding connection, in order to study the effect of wirebonding on the performance of the filter, in particular the frequency response. Electrical characterization results show that the through proper impedance matching, the bonding wire has minimum effect on the passband and stopband response, e.g., bandwidth, insertion loss, and out-of-band rejection. However, the wirebonding introduces a spurious mode at around 2.37GHz. As a result, the roll-off of the lower edge of the passband gets disturbed. EM simulation will be done to better understand the response of the wirebonding and finally to eliminate the spurious mode.
本文通过线键连接在PCB上对工作频率为2.4GHz的基于氮化铝(AlN)的射频微机电系统(RFMEMS)滤波器进行了表征,研究了线键连接对滤波器性能的影响,特别是频率响应。电学表征结果表明,通过适当的阻抗匹配,键合线对通带和阻带响应的影响最小,如带宽、插入损耗和带外抑制。然而,线键在2.37GHz附近引入了一个杂散模式。因此,通带下缘的滚转受到干扰。为了更好地理解线连接的响应,并最终消除杂散模式,将进行电磁仿真。
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引用次数: 1
LED multiphysics modeling for “Industry 4.0”, an approach proposed by the Delphi 4LED European project 由德尔福4LED欧洲项目提出的“工业4.0”LED多物理场建模方法
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654351
G. Farkas, L. Gaal, A. Poppe, M. Rencz, R. Bornoff
The Industry 4.0 initiative targets the digitalization of design and manufacturing processes. The aim of the Delphi 4LED project of the EU is to trigger this transition in the solid-state lighting industry by developing testing and modeling methodologies aimed at multi-domain characterization of LED based products. In this paper we present the concept and describe our approaches in modeling to create the appropriate “digital twins” of LED packages, modules and luminaires to be used in virtual prototypes applied in different system level design tasks.
工业4.0计划的目标是设计和制造过程的数字化。欧盟德尔福4LED项目的目标是通过开发针对基于LED产品的多领域表征的测试和建模方法,引发固态照明行业的这种转变。在本文中,我们提出了概念并描述了我们的建模方法,以创建适当的LED封装,模块和灯具的“数字双胞胎”,用于不同系统级设计任务中应用的虚拟原型。
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引用次数: 2
Development of cost effective Copper overburden removal for Via-Last TSV fabrication 低成本的铜覆盖层去除技术的发展
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654396
Qin Ren, W. Loh, Xiangy-Yu Wang
Through Silicon Via (TSV) is a high performance interconnect technique to enable 3D packaging. Compared to conventional 2D packaging using wire bonding or flip chip bonding, the length of the connections are shorter thus the interconnect and device density become higher. In this paper, we explored how combination of wet etch and Cu CMP can improve microscopic flatness for overburden removal after TSV Cu filling, while keeping the process cost low for Via-Last TSV fabrication.
通硅通孔(TSV)是一种高性能互连技术,可实现3D封装。与使用线键合或倒装芯片键合的传统2D封装相比,连接长度更短,因此互连和器件密度更高。在本文中,我们探索了湿蚀和Cu CMP的结合如何改善TSV Cu填充后覆盖层去除的微观平整度,同时保持低成本的工艺成本。
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引用次数: 0
Mechanical property and plated solder volume effect of Cu core ball 铜芯球的力学性能及镀锡量效应
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654322
J. Son, S.G. Lee, Y. Lee, S. Jung
Mechanical property of Cu core solder ball (CCSB) was investigated with different plated SAC305 solder volume and thickness at the ball-grid-array (BGA) after reflow. Cu core ball size was $220mu m$ and plated SAC305 on Cu core ball was tested the 3 kinds of thickness such as $8mu m$, $18mu m$, $28mu m$ with $Nimu m$ on the Cu ball surface. The (Cu, Ni)6 Sn5 interfacial IMCs were formed at interface between Cu/Ni core ball and plated solder layer after reflow. In addition, (Cu, Ni)6 Sn5 IMC was also observed at interface between plated solder and Cu-OSP pad after reflow. And these interfacial IMCs were increased after multiple reflow. Additionally, thicker SAC plating layer has higher IMC growth rate than thinner plated CCSB. In the Cu core ball joint property, thicker SAC plated layer is, the higher ductile deformation length by ball shear test (BST). And thinner SAC plated CCSB showed larger reduction rate of ductile deformation length than thicker SAC plated CCSB at BST after multiple reflow. In SMT test, minimum plated solder volume and thickness was conformed and calculated to get the stable SMT yield after flip chip process. So, when targeting gap size between PKG and interposer and solder resist opening (SRO) size were designed for PoP PKG development, it is possible to calculation of Cu core ball size and needed minimum plated volume to get good workability yield at flip chip bonding process.
研究了在球栅阵列(BGA)上镀不同SAC305焊料体积和厚度的铜芯焊料球(CCSB)回流后的力学性能。铜芯球尺寸为$220 μ m$,在铜芯球表面镀上$8 μ m$、$18 μ m$、$28 μ m$ 3种厚度的SAC305,并在Cu球表面镀上$Ni μ m$。回流后,在Cu/Ni芯球与镀锡层界面处形成(Cu, Ni)6 Sn5界面IMCs。此外,回流后在镀锡料与Cu- osp焊盘界面处也观察到(Cu, Ni)6 Sn5 IMC。多次回流后,这些界面IMCs增加。此外,较厚的SAC镀层比较薄的CCSB镀层具有更高的IMC生长速率。球剪试验(BST)表明,铜芯球接头性能中,SAC镀层越厚,塑性变形长度越长。经多次再流后,薄SAC镀层的CCSB在BST时的塑性变形长度的收缩率大于厚SAC镀层的CCSB。在SMT测试中,符合并计算了最小镀锡量和厚度,以获得倒装后稳定的SMT良率。因此,在为PoP PKG的开发设计目标PKG与中间层之间的间隙尺寸和阻焊开口(SRO)尺寸时,可以计算铜芯球尺寸和所需的最小镀量,以获得良好的倒装键合工艺的可加工成品率。
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引用次数: 5
A Modified Unequal Wilkinson Power Divider Using T-Shaped Transformers 用t形变压器改进的不等威尔金森功率分压器
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654262
Ren-Fu Tsai, Pu-Hua Deng, Ting-Jung Chang
Conventional microstrip unequal Wilkinson power divider is difficult to be realized when the power ratio is not small because high impedance transmission line is usually used. Although the previous unequal divider in 2012 can relax the high impedance line usage, the structure results in low impedance line issue. Therefore, this study proposed a modified unequal Wilkinson power divider using T-shaped transformers can avoid high and low impedance lines simultaneously.
传统的微带不均匀威尔金森功率分配器由于采用高阻抗传输线,在功率比不小的情况下难以实现。虽然2012年之前的不等分频器可以放松高阻抗线的使用,但这种结构导致了低阻抗线的问题。因此,本研究提出了一种采用t型变压器的改进型不等威尔金森功率分配器,可以同时避免高、低阻抗线。
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引用次数: 1
Design and optimization of the 10Tbps optical transmission system 10Tbps光传输系统的设计与优化
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654275
Huimin He, Man Zhao, Fengman Liu, H. Xue, Yu Sun, Liqiang Cao
To realize high-bandwidth interconnection between the optical module and ASIC and to make the CPU maximize its performance, an optical transmission system which is equipped with 192channels running at 56Gbps/ch with PAM4 signals is designed and proposed in this article. In this transmission system, 4 optical transceivers and an ASIC chip are co-packaged in the ceramic substrate. The optical transceiver adopts the 2.5D packaging structure. To ensure the normal operation of the whole optical system, the electrical performance of the transmission are carefully evaluated and the advice to the layout of the optical chip is proposed. Besides, thermal management of the optical system is evaluated and optimized from the heat-dissipation structure. Ultimately, the temperature of all the chips in the optical system are controlled under 105□. After assessing the electrical and the thermal performance of the optical system, the packaging scheme is a potential method manner to reach the high-bandwidth and high-density interconnection.
为了实现光模块与ASIC之间的高带宽互连,使CPU的性能最大化,本文设计并提出了一种采用PAM4信号、运行速度为56Gbps/ch的192通道光传输系统。在该传输系统中,4个光收发器和一个ASIC芯片被封装在陶瓷衬底中。光模块采用2.5D封装结构。为了保证整个光学系统的正常工作,对传输的电气性能进行了仔细的评估,并对光芯片的布局提出了建议。此外,还从散热结构方面对光学系统的热管理进行了评价和优化。最终,光学系统中所有芯片的温度都控制在105℃以下。通过对光学系统的电学性能和热学性能的评估,该封装方案是实现高带宽、高密度互连的一种潜在方法。
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引用次数: 0
Study of the die position accuracy in the fabrication process of a die first type FO-PLP 模首型FO-PLP加工过程中模具位置精度的研究
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654304
K. Nishido, H. Onozeki, N. Suzuki, T. Nonaka
Die position accuracy is one of the important topics of the fabrication processes of die first fan out packages (FO-PKG). In this research, the die position accuracy and the compensation were studied by the combined approach of the sample preparation and the numerical calculation. As a result, the flow didn’t influence on the die shift significantly and the die shift could be estimated by the component material properties, which were the curing shrinkage of the EMC (epoxy molding compound), and the CTE (coefficient of thermal expansions) and the elastic moduli of the EMC, the TBA (temporary bonding adhesive) and the support. The value of the thermal die shift can be predicted by the developed formulasm. The pre-shift die mouting using the predicted value singnificanltly can suppress the thermal die shift.
模具位置精度是模具先行扇形封装(FO-PKG)制造工艺的重要课题之一。本研究采用样品制备与数值计算相结合的方法,对模具位置精度和补偿进行了研究。结果表明,流动对模移的影响不明显,模移可以通过组成材料的性能来估计,即EMC(环氧成型化合物)的固化收缩率、CTE(热膨胀系数)和EMC、TBA(临时粘结剂)和支架的弹性模量。利用所建立的公式可以预测热模位移的值。利用预测值进行预移位模安装,可以显著抑制热模移位。
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引用次数: 4
Effect of Ar-N2Plasma Treatment on Copper Surface for Cu-to-Cu Wafer Bonding ar - n2等离子体处理对cu - cu晶圆键合铜表面的影响
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654291
H. Park, S. Kim
3D packaging technology offers great benefits such as reduced power consumption, improved performance, and reduced form factor. Among three key processes in 3D packaging a low temperature Cu-to-Cu wafer bonding is the subject of interest in this study. To accommodate high conductivity, non-formation of intermetallic compound, fine pitch connectivity, high pin count, and low cost, Cu-to-Cu wafer bonding is becoming increasingly important in advanced IC device packaging manufacturing. However, for high bonding quality, Cu-to-Cu wafer bonding requires high temperature process above $400^{circ}mathrm{C}$, which is not allowed in IC device packaging manufacturing. In this study the effect of Ar-N2 plasma treatment on Cu surface was investigated for low temperature Cu-to-Cu wafer bonding applications. Ar gas is used in a plasma ignition and the activation of Cu surface by ion bombardments, and the purpose of N2 gas was to passivate u surface from contaminations such as –O or –OH. The Cu/Ti/SiO2/Si specimens were fabricated on 8-inch Si wafers. Then various Ar-N2 plasma treatments were performed on Cu wafer surface. After the Ar-N2 plasma treatments, electrical and structural properties were analyzed by X-ray diffraction, X-ray photoelectron spectroscopy, atomic force microscope, and 4-point probe measurements. It has been confirmed that Ar-N2 plasma treatment can provide copper oxide removal and copper nitride passivation at the topmost Cu surface.
3D封装技术提供了巨大的好处,如降低功耗,提高性能,并减少了外形因素。在三维封装的三个关键工艺中,低温cu - cu晶圆键合是本研究感兴趣的主题。为了适应高导电性、不形成金属间化合物、细间距连接性、高引脚数和低成本,cu - cu晶圆键合在先进IC器件封装制造中变得越来越重要。然而,为了获得高键合质量,Cu-to-Cu晶圆键合需要高于$400^{circ} maththrm {C}$的高温工艺,这在IC器件封装制造中是不允许的。本文研究了Ar-N2等离子体处理对Cu表面低温Cu- Cu晶圆键合的影响。氩气体用于等离子体点火和离子轰击活化Cu表面,N2气体用于钝化u表面,使其免受-O或-OH等污染物的污染。将Cu/Ti/SiO2/Si试样制备在8英寸的硅片上。然后对铜晶片表面进行各种Ar-N2等离子体处理。通过x射线衍射、x射线光电子能谱、原子力显微镜和四点探针测量分析了Ar-N2等离子体处理后材料的电学和结构性能。结果表明,Ar-N2等离子体处理能有效去除铜表面最上层的氧化铜和氮化铜。
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引用次数: 1
Understanding of within Chip variation of optical appearance of Aluminum Pads 了解铝片光学外观在芯片内部的变化
Pub Date : 2018-12-01 DOI: 10.1109/EPTC.2018.8654354
L. W. Lee, M. Stefenelli, Agala Joel Baldevia, N. Evelyn
An electro assisted advanced adhesion promoter process is used to increase the mechanical and chemical robustness between mold compound and metal areas in the package [1], [2]. As quality monitoring method optical inspection is used. Where, for one product, a significant color difference between bond pads within a chip was observed. Our investigations proved that the color differences after the plating process are mainly due to the electrical characteristic of the specific chip in the specific product leading to electronegative static charge on individual bond pads.
采用电子辅助的高级附着力促进剂工艺来增加模具化合物和封装[1],[2]中金属区域之间的机械和化学坚固性。采用光学检测作为质量监控手段。其中,对于一种产品,观察到芯片内键合垫之间的显着色差。我们的研究证明,电镀过程后的颜色差异主要是由于特定产品中特定芯片的电气特性导致单个键垫上的电负性静电荷。
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引用次数: 0
期刊
2018 IEEE 20th Electronics Packaging Technology Conference (EPTC)
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