Szu-Chieh Wang, Chao‐Sung Lai, C. Lue, Chia‐Ming Yang
{"title":"Single Si3N4 layer on dual substrate for pH sensing micro sensor","authors":"Szu-Chieh Wang, Chao‐Sung Lai, C. Lue, Chia‐Ming Yang","doi":"10.1109/SAS.2009.4801778","DOIUrl":null,"url":null,"abstract":"In this study, a novel approach for realization of an inorganic ISFET/REFET system was presented. Single Si3N4 layer was used as the sensing membrane of EIS structure directly on n and p type substrate. The differential pH sensitivity of them is 25.1 mV/pH, and the linearity is higher than 99%. The drift effect for the single Si3N4 EIS structures could be minimized to around 1 mV/h by this differential arrangement. Besides, light and hysteresis effect for both conditions were investigated.","PeriodicalId":410885,"journal":{"name":"2009 IEEE Sensors Applications Symposium","volume":"16 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2009-03-16","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"0","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"2009 IEEE Sensors Applications Symposium","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SAS.2009.4801778","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
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Abstract
In this study, a novel approach for realization of an inorganic ISFET/REFET system was presented. Single Si3N4 layer was used as the sensing membrane of EIS structure directly on n and p type substrate. The differential pH sensitivity of them is 25.1 mV/pH, and the linearity is higher than 99%. The drift effect for the single Si3N4 EIS structures could be minimized to around 1 mV/h by this differential arrangement. Besides, light and hysteresis effect for both conditions were investigated.
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