Microstructures for arrays of chemical gas sensors

Abstract

Design modelling and experiments have been made for a new type of microstructure for chemical gas sensors. Minimisation of the dissipated power losses, of the technological and temperature induced mechanical stresses in the suspended structure and of the thermal response for a dynamically thermal work of the sensor, have been the main goals. Thermal analysis using the finite difference method and the finite element method has been made. Analysis of the effects of the mechanical stresses in the deposited layers was performed and the stress distribution has been analysed. A simple technological sequence has been developed for the deposition of the sensitive layer on a beam type suspended structure by both sputtering and oxidation or by sol-gel methods.