C. Hagleitner, D. Lange, N. Kerness, A. Hierlemann, O. Brand, H. Baltes
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引用次数: 18
Abstract
A single-chip chemical microsensor system fabricated in industrial 0.8 /spl mu/m CMOS technology includes three different polymer-coated micromachined transducers. The chip forms an integral part of a handheld unit to detect volatile organics. On-chip circuitry includes signal conditioning, A/D-converters, filters, digital controller, and serial bus interface (I/sup 2/C).
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