ZnO nanowires-based piezoelectric energy transducers: the role of size and semiconducting properties

T. Jalabert, Manojit Pusty, Andrés Jenaro Lopez Garcia, A. Cresti, M. Mouis, G. Ardila
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Abstract

Piezoelectric thin films are widely used in MEMS and NEMS actuators and resonators, but also in mechanical sensors and energy harvesters for IoT applications and Wireless Sensors Networks. Nanotechnology involving piezoelectric materials is a key research direction, with benefits expected from nanostructuring and the replacement of toxic materials. Piezoelectric nanocomposites based on semiconducting nanowires (NWs) are an alternative to thin films with nanostructuration benefits, such as low temperature fabrication and higher flexibility than thin films. In addition, they exhibit larger piezoelectric coefficient than their thin films counterparts. In this work we study the piezoelectric performance of vertically grown ZnO NWs based on Finite Element simulations in the PFM (Piezoresponse Force Microscopy) configuration. In this AFM (Atomic Force Microscope) mode, the AFM tip is placed in contact with the top surface of the NW while applying a voltage, thus inducing a deformation of the structure by the reverse piezoelectric effect. Different parameters are assessed: the effect of the surrounding air, the NW size and geometry and the effect of the semiconducting properties, in particular the doping level and surface traps density. The results are compared to previous theoretical approaches and experimental findings.
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基于ZnO纳米线的压电能量换能器:尺寸和半导体特性的作用
压电薄膜广泛用于MEMS和NEMS致动器和谐振器,也用于物联网应用和无线传感器网络的机械传感器和能量采集器。涉及压电材料的纳米技术是一个关键的研究方向,有望从纳米结构和替代有毒材料中获益。基于半导体纳米线(NWs)的压电纳米复合材料是薄膜的替代品,具有纳米结构的优点,如低温制造和比薄膜更高的柔韧性。此外,它们比薄膜材料表现出更大的压电系数。在这项工作中,我们基于PFM(压电响应力显微镜)结构的有限元模拟研究了垂直生长ZnO NWs的压电性能。在这种AFM(原子力显微镜)模式中,AFM尖端与NW的顶表面接触,同时施加电压,从而通过反向压电效应诱导结构变形。评估了不同的参数:周围空气的影响,NW尺寸和几何形状以及半导体特性的影响,特别是掺杂水平和表面陷阱密度。结果与以往的理论方法和实验结果进行了比较。
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