A 2DOF MEMS Vibrational Energy Harvester

K. Tao, L.H. Tang, J. Wu, J. Miao
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引用次数: 1

Abstract

In this paper, a novel two-degree-of-freedom (2DOF) MEMS electromagnetic vibration energy harvesting system is proposed. The dual-mass resonant structure that comprises of a primary mass and an accessory mass is structured on silicon-on-insulator (SOI) wafer by double-sided deep reactive-ion etching (DRIE). Unlike previous 2DOF harvesters, the induction coil is only patterned on the primary mass for energy conversion. By carefully adjusting the weight of accessory mass, the first two resonances of the primary mass can be tuned close to each other while maintain comparable magnitudes. Therefore, both resonances could contribute to energy harvesting that make the system more efficient and adaptive in frequency-variant vibrational circumstances. With the current prototype, two close resonances with a frequency ratio of only 1.19 and comparable peaks are achieved, providing good validation for the modeling results.
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一种2DOF MEMS振动能量采集器
提出了一种新型的二自由度MEMS电磁振动能量采集系统。采用双面深反应蚀刻(DRIE)技术,在绝缘体硅(SOI)晶圆上构建了由主质量和副质量组成的双质量谐振结构。与之前的二自由度收割机不同,感应线圈仅在主要质量上进行能量转换。通过仔细调整辅助质量的重量,主质量的前两个共振可以调谐到彼此接近,同时保持相当的量级。因此,这两种共振都有助于能量收集,使系统在频率变化的振动环境中更有效和自适应。在目前的原型中,实现了两个频率比仅为1.19的紧密共振和可比较的峰值,为建模结果提供了很好的验证。
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