{"title":"Design and simulation of a integrated Mach-Zehnder interferometer sensor","authors":"M. Ionita, M. Kusko","doi":"10.1109/SMICND.2010.5650448","DOIUrl":null,"url":null,"abstract":"In this paper we present the simulation results of a proposed integrated Mach-Zehnder interferometer sensor. The sensor can be fabricated from polymeric materials like SU8 and PMMA using the e-beam lithography. The numerical simulations consider the detection of the analysis medium refractive index ranging from 1.33 to 1.36.","PeriodicalId":377326,"journal":{"name":"CAS 2010 Proceedings (International Semiconductor Conference)","volume":"19 1","pages":"0"},"PeriodicalIF":0.0000,"publicationDate":"2010-12-03","publicationTypes":"Journal Article","fieldsOfStudy":null,"isOpenAccess":false,"openAccessPdf":"","citationCount":"1","resultStr":null,"platform":"Semanticscholar","paperid":null,"PeriodicalName":"CAS 2010 Proceedings (International Semiconductor Conference)","FirstCategoryId":"1085","ListUrlMain":"https://doi.org/10.1109/SMICND.2010.5650448","RegionNum":0,"RegionCategory":null,"ArticlePicture":[],"TitleCN":null,"AbstractTextCN":null,"PMCID":null,"EPubDate":"","PubModel":"","JCR":"","JCRName":"","Score":null,"Total":0}
引用次数: 1
Abstract
In this paper we present the simulation results of a proposed integrated Mach-Zehnder interferometer sensor. The sensor can be fabricated from polymeric materials like SU8 and PMMA using the e-beam lithography. The numerical simulations consider the detection of the analysis medium refractive index ranging from 1.33 to 1.36.
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