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Ka-band RF MEMS phase shifters for energy starved millimetre-wave radar sensors 用于能量匮乏的毫米波雷达传感器的ka波段射频MEMS移相器
Pub Date : 2010-12-03 DOI: 10.1109/SMICND.2010.5650746
R. Malmqvist, C. Samuelsson, B. Carlegrim, P. Rantakari, T. Vaha-Heikkila, A. Rydberg, J. Varis
Low-loss millimetre-wave RF MEMS phase shifters made on quartz are assessed with respect to a Ka-band low-power multifunctional radar sensor application. A loaded line type of phase shifter circuit presents a phase shift of 22.3° and a loss of 0.4 dB at 35 GHz. A switched line phase shifter gives 187° of phase shift and 1.5 dB of loss at 30 GHz (i.e. a FoM=122°/dB). We estimate that a 5-bit loaded line/switched line MEMS phase shifter circuit can achieve a loss of 4 dB at 35 GHz which could reduce by a factor 2 the required transmit DC power level in a Ka-Band energy starved phased array radar system.
针对ka波段低功耗多功能雷达传感器的应用,对石英制成的低损耗毫米波射频MEMS移相器进行了评估。负载线型移相电路在35 GHz时相移为22.3°,损耗为0.4 dB。开关线移相器在30 GHz时的相移为187°,损耗为1.5 dB(即FoM=122°/dB)。我们估计,5位负载线/开关线MEMS移相器电路在35 GHz时可以达到4 dB的损耗,这可以将ka波段能量匮乏的相控阵雷达系统所需的发射直流功率水平降低2倍。
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引用次数: 17
The caracterization of the CdS-based solar cell heterojunctions 基于cds的太阳能电池异质结的表征
Pub Date : 2010-12-03 DOI: 10.1109/SMICND.2010.5650233
T. Potlog, V. Botnariuc, L. Gorceac, N. Spalatu, N. Maticiuc, S. Raievschi
The CdS-based solar cell heterojunctions (HJ) have been obtained by growth of CdS at relatively lower temperature using the close space sublimation method (CSS). Investigation of the photovoltaic characteristics shows an efficiency of about 12 % for InP/CdS and 9.6 % for CdS/CdTe solar cell HJ. The analysis of the forward dark current-voltage and the capacitance-voltage characteristics indicate a tunnelling recombination current which flows through states near or at the interfaces of a thermal energy of about 0.62 eV for CdS/CdTe and 0.42 eV for InP/CdS solar cell heterojunctions. The solar energy conversion efficiency is influenced by the interface states through the open circuit voltage and the fill factor.
利用近空间升华法(CSS)在较低温度下生长CdS,获得了基于CdS的太阳能电池异质结(HJ)。光伏特性的研究表明,InP/CdS的效率约为12%,cd /CdTe的效率约为9.6%。正向暗电流-电压和电容-电压特性分析表明,在CdS/CdTe和InP/CdS异质结附近或界面处存在隧穿复合电流,其热能约为0.62 eV和0.42 eV。太阳能转换效率通过开路电压和填充系数受界面状态的影响。
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引用次数: 1
Micro-to nano-biosensors and actuators integrated for responsive delivery of countermeasures 微到纳米生物传感器和执行器集成响应交付的对策
Pub Date : 2010-12-03 DOI: 10.1109/SMICND.2010.5650417
S. Peteu
A fresh perspective of bio-inspired engineering is applied to emerging concepts, designs, applications in the area of responsive delivery of countermeasures. In particular, cutting edge, broad impact applications are examined, such as nanorobotics or integrated sensing-actuating functions down to nano-scale. These can be used towards the recognitive release of therapeutic agents. The ideas and concepts expressed are fertilized with a biomimetic twist, thereby leveraging nature's million years of sustainable evolution. Moreover, a radically new look is emphasized: of the hierarchically multi-level integrated self-healed biosystems that shall emulate positive revolutionary changes for the future bio-inspired, smart therapies with personalized, design.
生物启发工程的新视角应用于新兴概念,设计,应用领域的响应性对策交付。特别是,前沿,广泛影响的应用程序进行了检查,如纳米机器人或集成传感驱动功能到纳米尺度。这些可用于治疗剂的识别释放。所表达的想法和概念被赋予了仿生学的扭曲,从而利用了大自然数百万年的可持续进化。此外,强调了一种全新的外观:层次多层次的集成自愈生物系统,将模仿积极的革命性变化,为未来的生物灵感,个性化的智能疗法设计。
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引用次数: 7
Using the Coherence Correlation Interferometry (CCI) technique for study topography of the C-Ni films deposited on porous silicon 利用相干相关干涉技术(CCI)研究了多孔硅表面沉积C-Ni薄膜的形貌
Pub Date : 2010-12-03 DOI: 10.1109/SMICND.2010.5649092
M. Suchańska, M. Makrenek, J. Świderski
Possibilities of applications Coherence Correlation Interferometry technique for topological studies of microporous materials on example C-Ni films deposited on porous silicon are discussed.
讨论了相干相关干涉技术应用于微孔材料拓扑结构研究的可能性。
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引用次数: 0
Micromachining and nanoprocessing of GaN/Silicon for SAW and UV photodetector manufacturing 用于SAW和UV光电探测器制造的GaN/硅的微加工和纳米加工
Pub Date : 2010-12-03 DOI: 10.1109/SMICND.2010.5650290
A. Muller, G. Konstantinidis, D. Neculoiu, A. Dinescu, M. Andrulidaki, A. Stavrinidis, A. Cismaru, A. Stefanescu, M. Carp, C. Anton, A. Muller, R. Gavrila, D. Dascalu
The paper presents the manufacturing and the characterization of two novel devices on GaN/Si. The first device is a SAW structure for the GHz frequency range manufactured using nanolithografic techniques on GaN. Fingers and intedigits spacing 300nm wide have been successful developed in a single metal PMMA layer. An operating frequency close to 4 GHz has been obtained. For the second device, a membrane supported MSM UV photodetector on GaN, both micromachining techniques and nanolithography have been used. The MSM interdigitated structure of the photodetector had 500nm wide fingers/spacings. A very high responsivity (about 10 A/W for 6V) and the very low dark current (<1pA for V=3V) have been obtained.
本文介绍了两种新型GaN/Si器件的制备和表征。第一个器件是GHz频率范围的SAW结构,使用GaN上的纳米光刻技术制造。在单个金属PMMA层中成功地开发了间距为300nm的手指和手指间。已获得接近4ghz的工作频率。第二种器件是氮化镓上的膜支撑MSM紫外光电探测器,采用了微加工技术和纳米光刻技术。MSM交叉指状结构的光电探测器具有500nm宽指间距。获得了非常高的响应率(6V时约为10 A/W)和非常低的暗电流(V=3V时<1pA)。
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引用次数: 0
New method for TiO2 covalent-ionic functionalization with different molecules for induced properties 不同分子TiO2共价离子功能化诱导性能的新方法
Pub Date : 2010-12-03 DOI: 10.1109/SMICND.2010.5650685
S. Sava, Ludmila Iarca, C. Trisca-Rusu, A. Nechifor, Ș. Voicu, G. Nechifor
A new efficient method for TiO2 fucntionalization with different molecules is presented in this paper. The method is based on TiO2 functionalization with lysine, followed by reaction between amino group from lysine and a functional group from another molecule. In this case the reaction was performed with crown ether using cyanuric chloride as spacer. An infra red spectroscopy study was performed in order to characterize the synthesized molecules.
本文提出了一种用不同分子进行TiO2官能化的新方法。该方法是基于TiO2与赖氨酸的功能化,然后赖氨酸的氨基与另一分子的官能团之间的反应。在这种情况下,用冠醚进行反应,用三聚氰胺作为间隔剂。为了对合成的分子进行表征,进行了红外光谱研究。
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引用次数: 0
Study of the interactions of ions in silicon: Transient processes and defect production 硅中离子相互作用的研究:瞬态过程和缺陷的产生
Pub Date : 2010-12-03 DOI: 10.1109/SMICND.2010.5650688
S. Lazanu, I. Lazanu, G. Iordache, I. Stavarache, A. Lepadatu, A. Slav
The thermal spike model which takes into account both ionization and nuclear energy loss processes of the projectile as distinct electronic and atomic heat sources is used to describe transient processes induced by ions in silicon. The time and space dependencies of the lattice and electron temperatures near the projectile trajectory are calculated. The contribution of the rise in temperature on defect formation and annealing is considered.
将弹丸的电离过程和核能量损失过程作为不同的电子热源和原子热源考虑在内的热尖峰模型用于描述硅离子诱导的瞬态过程。计算了弹丸轨迹附近晶格温度和电子温度的时空依赖关系。考虑了温度升高对缺陷形成和退火的影响。
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引用次数: 1
Influence of technological parameters on the dynamic behavior of a MEMS accelerometer 工艺参数对MEMS加速度计动态性能的影响
Pub Date : 2010-12-03 DOI: 10.1109/SMICND.2010.5650639
C. Comeaga, G. Ionascu, E. Manea, A. Sandu, L. Bogatu, D. Besnea
The paper deals with studying the mechanical structure of a bulk-micromachined silicon piezoresistive accelerometer by using FEM (Finite Element Method). The vibration modes (resonant frequencies) and sensitivity were predicted. The results of numerical simulation, validated experimentally have pointed out the influence of manufacturing process parameters on the accelerometer performance.
本文采用有限元法研究了体积微加工硅压阻式加速度计的力学结构。预测了振动模态(谐振频率)和灵敏度。数值模拟和实验验证的结果指出了制造工艺参数对加速度计性能的影响。
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引用次数: 4
Topography and structure of nanocomposite C-Ni field emitters 纳米复合C-Ni场致发射体的形貌与结构
Pub Date : 2010-12-03 DOI: 10.1109/SMICND.2010.5650263
E. Czerwosz, I. Iwanejko, A. Kamińska, J. Rymarczyk, J. Keczkowska, M. Suchańska, F. Craciunoiu, F. Comanescu
In this paper we present results of structural and topographical studies of C-Ni nanocomposite films with different Ni content. Films were obtained by PVD method. Their structure was investigated by Raman and FTIR spectroscopy and topography by AFM. Typical field emission current from these films is few µA (up to 10 µA) for 3kV anode-cathode voltage and 0.1mm anode-cathode distance.
本文介绍了不同镍含量C-Ni纳米复合膜的结构和形貌研究结果。采用PVD法制备薄膜。用拉曼光谱和红外光谱对其结构进行了表征,并用原子力显微镜对其形貌进行了表征。当阳极阴极电压为3kV,阳极阴极距离为0.1mm时,这些薄膜的典型场发射电流为几µA(高达10µA)。
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引用次数: 0
A short route of micrometric magnetite synthesis via Fe-EDTA thermal decomposition Fe-EDTA热分解合成微磁铁矿的捷径
Pub Date : 2010-12-03 DOI: 10.1109/SMICND.2010.5650629
M. Chirita, R. Banica, P. Sfirloaga, A. Ieta, I. Grozescu
We develop an procedure for synthesizing micrometric magnetite crystals after two hours of autoclavation at 250°C by hydrothermal decomposition of Fe- Ethylenediaminetetraacetic acid (Fe-EDTA) complex in the presence of urea starting from Fe (III)-Ferric Ammonium Sulfate (FAS), and Na4EDTA as main precursors. Crystals with 10–15 µm in size (along the <001> axis), were obtained. X-ray diffraction (XRD), scanning electron microscopy (SEM), energy dispersive X-ray spectroscopy and magnetic measurements were performed to investigate the final product. A low remanent magnetization (5 emu/g) was observed at high level magnetic field intensity (3.8 kOe), emulating superparamagnetic behavior, uncommon for magnetic microparticles at room temperature.
以Fe (III)-硫酸铁铵(FAS)为起始原料,以Na4EDTA为主要前体,在250°C下,通过水热分解Fe-乙二胺四乙酸(Fe- edta)配合物,在250°C下蒸压2小时后合成微米级磁铁矿晶体。晶体尺寸为10-15µm(沿轴方向)。通过x射线衍射(XRD)、扫描电镜(SEM)、能量色散x射线能谱(能谱)和磁性测量对最终产物进行了表征。在高磁场强度(3.8 kOe)下观察到低剩余磁化强度(5 emu/g),模拟了室温下磁性微粒不常见的超顺磁行为。
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引用次数: 6
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CAS 2010 Proceedings (International Semiconductor Conference)
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